Control system for ion implanter
专利汇可以提供Control system for ion implanter专利检索，专利查询，专利分析的服务。并且PURPOSE: To limit the number of group-controlling transmitting parts to only one, by constituting a control system to connect a group-control computer to plural ion implanter controller with a single looplike transmitting passage, give control conditions to them and receive monitoring data.
CONSTITUTION: A control system is constituted of ion implanter controllers 51W53 inclusive of system controlling controllers 61W63 performing control on the basis of given control conditions and taking in monitoring data and outputting them, and transmitting parts 65W67, and a group-control computer 54. An interval between the computer 54 and each of these controllers 51W53 is connected with a transmitting passage 104 of an optical fiber or the like in a single loop form. And, monitoring data and other reports are received by the computer 54, displaying them on a cathode-ray tube 101, while they are transmitted to a host computer. Therefore, a group of ion implanters are made monitorable at one spot alone and, what is more, transmitting time is reducible.
COPYRIGHT: (C)1987,JPO&Japio，下面是Control system for ion implanter专利的具体信息内容。
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