专利汇可以提供Gas sensor专利检索,专利查询,专利分析的服务。并且PURPOSE: To obtain a high-sensitivity sensor which suits to the detection of low-concentration gas and is easily maintained by using a TCNQ complex as a gas sensing part and leading out an electric signal indicating variation in the electric conductivity of the TCNQ complex caused when it contacts gas to be inspected.
CONSTITUTION: Counter electrodes 2a and 2b are formed by vapor-depositing Au on a cleaned glass substrate 6 and a gas sensitive thin film 3 is formed of a metal.TCNQ complex (e.g. Cu.TCNQ complex) on their surfaces. This thin film 3 is formed by dispersing fine crystal of the Cu.TCNQ complex pulverized by a ball mill and employing a spin-coating method. For example, when NO
2 is used as the gas to be inspected, the sensor 1 is heated in gaseous N
2 to desorb water adsorbed to the surface and then heated to specific temperature. A specific voltage is applied between the electrodes 2a and 2b by using a potentiostat, etc., and a fine ammeter is connected in the middle of wiring. Then the sensor is exposed to atmospheric gas and variation of a fine current with the electric conductivity of the thin film 3 is measured to detect the gaseous NO
2 .
COPYRIGHT: (C)1987,JPO&Japio,下面是Gas sensor专利的具体信息内容。
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