Laser scriber control system
阅读：732发布：2023-05-12
专利汇可以提供Laser scriber control system专利检索，专利查询，专利分析的服务。并且A laser scribe system is disclosed for aligning a wafer on which circuits are deposited, and for controlling the motion of a chuck, supporting the wafer, so that kerfs are cut in the wafer between all the circuits. The chuck is movable along X and Y axes in a XY plane by two indexable stepping motors, with a laser providing a beam in a direction perpendicular to the XY plane. The system is operable in an Align mode in which the chuck is movable back and forth in the X axis and the chuck is rotatable about an axis perpendicular to the XY plane until streets, representing wafer space between circuits, are aligned in the X axis. The system automatically sequences through several scribing phases during which the chuck is moved automatically in the X and Y axes at optimum speed to cut kerfs in all the streets of the wafer.，下面是Laser scriber control system专利的具体信息内容。
1. A scribe system for cutting kerfs in horizontal and vertical streets of a wafer having deposited in a planar surface thereon a plurality of spaced apart circuits with the spaces between the circuits defining said horizontal and vertical streets, the system comprising: first means for providing a beam of energy in a direction transverse to the planar surface of the wafer, the energy being sufficient to cut a kerf in the planar surface of the wafer in said transverse direction; movable means for providing a movement of the wafer relative to the first means in X and Y directions defining the planar surface of the wafer and respectively corresponding to the horizontal and vertical streets of the wafer; and control means for controlling the movement of said movable means in said X and Y directions to expose a preselected pattern on said wafer surface to said energy beam, said control means including first and second indexable bidirectional stepping motors, means for defining a sequence of movements of the wafer relative to the first means along the horizontal and vertical streets of the wafer and means for controlling said first motor to step the movable means at full speed in a first path in the X direction to move said movable means so as to expose a horizontal street between selected boundaries to said beam, means responsive to the position of the wafer in the X direction for controlling said first motor to step the movable means at full speed in an opposite path in the X direction upon the traversal of one of the selected boundaries by the wafer relative to the first means, means responsive to the position of the wafer in the X direction for controlling said second motor for stepping the movable means in the Y direction through a space corresponding to the space between adjacent horizontal streets during the operation of the first motor at full speeds in the X direction, means responsive to the position of the wafer for controlling the second motor to step the movable means at full speed in a first path in the Y direction to move said movable means so as to expose a vertical street between selected boundaries to said beam when the first and second motors have simultaneously moved the wafer past selected ones of the boundaries in the X and Y directions, means responsive to the position of the wafer in the Y direction for controlling said second motor to step the movable means at an opposite path in the Y direction upon the traversal of one of the selected boundaries by the wafer relative to the first means, and means responsive to the position of the wafer in the Y direction for controlling said first motor to step the movable means in the X direction through a space corresponding to the space between adjacent vertical streets during the operation of the second motor in moving the movable means at full speeds in the Y direction.
2. A system as recited in claim 1 wherein said control means includes first and second motor control means associated with said first and second motors, respectively, each of said motor control means including a bidirectional counter, each of said counters being indexable to store a count therein representing the number of steps of the motor associated therewith required for the wafer to traverse through an index distance dependent upon the distance between the boundaries in the direction of movement of said movable means controlled by the associated motor, means individually associated with each of the motors for receiving a signal representing the path of movement to be provided by that motor along the individual one of the X and Y directions, anD means for decrementing the count in an associated one of said counters when the associated motor steps the movable means in the first path in the particular one of the X and Y directions and for incrementing the count in the associated counter whenever the associated motor steps the movable means in the opposite path in the particular one of the X and Y directions, and limit means responsive to the count in an associated counter for commanding an associated one of said motors to reverse its path in the particular one of the X and Y directions when the count in said associated counter exceeds a preselected value.
3. A system as recited in claim 2 wherein the limit means of each motor further includes means for providing an index complete signal to said control means to obtain a reversal of the associated motor when the count in said associated counter reaches said preselected value.
4. A system as recited in claim 1 wherein said control means includes first and second motor control means associated with said first and second motors respectively, said first motor control means controlling the motion of said movable means along the X axis of said XY plane and said second motor control means controlling the motion of said movable means along the Y axis of said XY plane, with said vertical streets being parallel to one another and perpendicular to the X axis and the horizontal streets being parallel to one another and perpendicular to the Y axis, each of said bidirectional counters being indexable to store a number representing the number of steps of the motor associated therewith required to move said movable means an index distance equal to the distance between adjacent streets, each motor control means further including first and second logic switches each responsive to a signal supplied thereto by said control means to control the path of movement of the movable means in the particular one of the X and Y directions, said first logic switch being further responsive to stepping pulses from the motor for decrementing the count of said counter when the motor steps the movable means in the first path and for incrementing the count of said counter when the motor steps the movable means in the opposite path, and said second logic switch reversing the path of the associated motor when the count in said associated counter exceeds the preselected value.
5. A system as recited in claim 4 further including means in said motor control means for providing to said second motor a signal to step the movable means each index distance along the Y axis during the cutting of the kerfs along the horizontal streets in accordance with the movements of the movable means at full speeds along the X axis and for providing to said first motor a signal to step the movable means each index distance along the Y axis during the cutting of the kerfs along the vertical streets in accordance with the movements of the movable means at full speeds along the Y axis.
6. A scribe system for cutting kerfs in a wafer along a first plurality of lines which are parallel to one another along an X axis, the spacings between adjacent lines defining a vertical index distance, and a second plurality of lines which are parallel to one another along a Y axis perpendicular to said X axis, the spacing between adjacent lines of said second plurality defining a horizontal index distance, the system comprising: means for cutting the kerfs on the wafer, movable means for providing a movement of the wafer relative to the cutting means; system means for controlling the motion of said movable means in a plane defined by the X and Y axes, said system means including first motor means for controlling the motion of said movable means along the X axis of said plane and second motor means for controlling the motion of said movable means along the Y axis and further including means including the first motor means for providing movements of the movable means along The X axis at full speeds between first and second selected boundaries to provide a movement of the movable means alternately in a first path along the X axis from the first boundary to the second boundary and alternately in an opposite path along the X axis from the second boundary to the first boundary, means including the second motor means for indexing the movable means for movement at a substantially uniform speed through a vertical index distance upon each traversal of the movable means between the first and second boundaries and during the movement of the movable means by the first motor means along the X axis; and alignment means for aligning said wafer relative to said energy means for movement of the movable means along said X axis, said alignment means including means for defining first and second alignment boundaries along said X axis and for controlling said first motor means to move said support means along said X axis back and forth between said alignment boundaries.
7. A system as recited in claim 6 wherein said alignment means includes means for defining first and second boundaries along the Y axis, and means for controlling said first motor means to move said movable means each of a plurality of horizontal index distances between said X boundaries at a substantially uniform speed during the movement of the movable means in the Y direction at positions past the Y boundaries and means for controlling said second motor means to move said movable means at full speed in a first path along the Y axis and alternately in an opposite path along the Y axis between said Y boundaries at full speeds upon the movement of the movable means in the paths at full speeds along the X axis to a position simultaneously beyond the boundaries of the X and Y axes.
8. A system as recited in claim 7 wherein said first motor means includes a first bidirectional stepping motor and a first motor control circuit and a first counter responsive to a movement of the movable means through a vertical index distance for storing in the counter a number representing the number of steps of said first motor required to move said movable means a distacne at least equal to the distance between the first and second boundaries along the X axis.
9. A system as recited in claim 6 wherein said system means include means including the second motor means for providing movements of the movable means along the Y-axis at full speeds between third and fourth selected boundaries to provide a movement of the movable means alternately in a first path along the Y-axis from the third boundary to the fourth boundary and alternately in an opposite path along the Y-axis from the fourth boundary to the third boundary and further include means including the first motor means for indexing the movable means through a horizontal index distance upon each traversal of the movable means along the Y-axis between the third and fourth boundaries.
10. A system as set forth in claim 9, including, means for initially providing movements at full speeds of the movable means along the X-axis between the first and second boundaries and means responsive to the simultaneous traversal of the movable means past a selected one of the first and second boundaries and a selected one of the third and fourth boundaries for subsequently providing movements of the movable means along the Y-axis at full speeds between the third and fourth boundaries.
11. A system as recited in claim 10 wherein said alignment means include viewing means for viewing the wafer, said viewing means including an X axis indicator aligned with said X axis, whereby when the lines of said first plurality of lines are parallel to said indicator said first plurality of lines are aligned in said X axis, said alignment means further including means for rotating said movable means about an axis perpendicular to the plane defined by the X and Y axes to thereby align said first pluralitY of lines to be parallel to said indicator.
12. A system as recited in claim 11 wherein said first motor means includes a first bidirectional stepping motor and a first motor control circuit and a first counter and responsive to each movement of the movable means through a vertical index distances during the movements of the movable means at full speeds along the X axis for storing in the counter a number representing the number of steps of said first motor required to move said movable means a distance at least equal to the distance between the first and second boundaries and said second motor means includes a second bidirectional stepping motor and a second motor control circuit and a second counter and responsive to each movement of the movable means through a horizontal index distance during the movements of the movable means at full speeds along the Y axis for storing in the second counter a number representing the number of steps of the second motor required to move the movable means a distance at least equal to the distance between the third and fourth boundaries.
13. A system as set forth in claim 10 wherein means are included for providing a movement of the movable means in a particular searching path after the alignment of the movable means along the X and Y axes and means are responsive to the simultaneous traversal by the movable means past one of the first and second boundaries and past one of the third and fourth boundaries in the searching path for initiating the movement of the movable means alternately between the first and second boundaries.
14. A system as set forth in claim 13 wherein the means providing for the movement of the movable means in the searching path initially provides a movement of the movable means in a first path along the Y-axis between the third and fourth boundaries past one of such boundaries and then provides a movement of the movable means in an opposite path for a particular distance along the Y-axis and then provides a movement of the movable means in a first path along the X-axis between the first and second boundaries past one of such boundaries.
15. In a scribe system for cutting kerfs in a wafer on which a plurality of circuits are deposited, the circuits being spaced so as to define a first plurality of streets parallel along an X axis and a second plurality of streets parallel along a Y axis perpendicular to said X axis, the arrangement comprising: energy means for providing a beam of energy capable of cutting the wafer in a direction transverse to the X and Y axes; movable means for providing a movement of the wafer relative to the energy along the X and Y axes; system means for controlling the motion of said movable means in a plane defined by the X and Y axes, said system means including first motor means for controlling the motion of said movable means along the X axis of said plane and second motor means for controlling the motion of said movable means along the Y axis; the system means including the first motor means and first additional means for providing alternate movements at full speeds of the movable means between first selected boundaries along the X-axis and including the second motor means and second additional means for providing a stepping of the wafer relative to the energy means between adjacent streets along the X axis upon each traversal by the movable means at full speeds of the first selected boundaries along the X-axis and during the movement of the movable means along the X-axis; viewing means including an X axis indicator for viewing said wafer with said X axis indicator superimposed thereon along said X axis; alignment control means including actuatable means for activating said system means in an alignment mode in which said support means is moved back and forth along said X axis to provide for the direction of the energy by the energy means along one of the streets in the second plurality; and actuatable means for rotating said support means about an axis perpendicular to said plane defined by said X and Y axes so that said streets in the first plurality are parallel with the X axis.
16. A system as recited in claim 17 wherein said viewing means comprises a microscope and said X axis indicator comprises a first cross hair aligned in said X axis whereby when the first plurality of streets is not aligned with the X axis the streets seem to oscillate above and below said first cross hair, as said support means is moved back and forth in said X axis.
17. A system as recited in claim 15 wherein said system means includes means operable during the alignment of the movable means along the X and Y axes to provide X axis alignment boundaries which control the extent of the back and forth movement of said means along said X axis, the distance between the X axis alignment boundaries being less than the distances between the outer streets of said second plurality of streets.
18. A system as set forth in claim 15 including, the system means including the second motor means and third additional means for providing alternate movements of the movable means at full speeds along the Y-axis between second selected boundaries along the Y axis and including the first motor means and fourth additional means for providing a stepping of the wafer relative to the energy means between adjacent streets along the Y-axis upon traversal by the movable means at full speeds of the first selected boundaries along the Y-axis and during the movement of the movable means along the Y-axis.
19. A system as set forth in claim 18 wherein means are responsive to the traversal by the movable means simultaneously beyond one of the first selected boundaries and one of the second selected boundaries for interrupting the operation of the first and second additional means in moving the movable means at full speeds along the X-axis and indexing the movable means along the Y-axis and providing an operation of the third and fourth additional means in moving the movable means at full speeds along the Y-axis and indexing the movable means along the X-axis.
20. A system as set forth in claim 19 wherein means are included for providing a movement of the movable means in a particular searching path after the alignment of the movable means along the X and Y axes and means are responsive to the traversal by the movable means beyond one of the first selected boundaries and one of the second selected boundaries in the searching path for initiating the operation of the first additional means and the second additional means in moving the movable means at full speeds along the X-axis and indexing the movable means along the Y-axis.
21. A system as set forth in claim 20 wherein the means providing for the movement of the movable means in the searching path initially provides a movement of the movable means in a first path along the Y-axis between the second pair of boundaries past one of such boundaries and then provides a movement of the movable means in an opposite path for a particular distance along the Y-axis and then provides a movement of the movement of the movable means in a first path along the X-axis between the first pair of boundaries past one of such boundaries.
22. A system as recited in claim 16 wherein said microscope further includes a second cross hair, perpendicular to said first cross hair, and said arrangement further includes means for supplying stepping pulses to said first motor means for moving said movable means in said X axis until said second cross hair bisects one of the streets of said second plurality of streets.
23. A system as recited in claim 22 further including means for supplying stepping pulses to said second motor means for moving said movable means in said Y axis after said first plurality of streets has been aligned in said X axis until said first cross hair substantially bisecTs one of the streets of said first plurality of streets.
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