Semiconductor pressure converter
专利汇可以提供Semiconductor pressure converter专利检索，专利查询，专利分析的服务。并且PURPOSE: To establish the pressure detector for automobile engines without open wire and excellent in the electric insulation, by converting the change in atmosphere pressure into electric signal with piezo effect by taking vacuum, that is, absolute pressure as the reference.
CONSTITUTION: The Si diaphragm 1 consists of the thick fixed part and thin pressure detection part, the gauge resistor 2 is placed on one side with diffusion, and corrosion-proof metal electrode 3 is sputtered at one end. This chip is coupled with the die of BSG under vacuum. On the other hand, at a part of the ceramic substrate 6 having the operational amplifier 5, the hole 7 with bottom is provided, and the die 4 is fixed at the bottom with Si adhesives rich in elasticity. The depth is adjusted as that the electrode 3 on the chip is matched with the electrode 9 on the substrate 6 for the surface position. Connection is made with gold wire, the pressure introducing and protective cover 11 is bonded further, at the both sides of the substrate 6, the lead frame 12 for input and output, and for printed board fitting, is attached. With this constitution, the pressure detector suitable for automobile can be obtained with high insulation, no open wire and thin type.
COPYRIGHT: (C)1979,JPO&Japio，下面是Semiconductor pressure converter专利的具体信息内容。
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