专利汇可以提供Detector for foreign matter专利检索,专利查询,专利分析的服务。并且PURPOSE:To detect correctly foreign matters from a minute size to a large size by constituting a detector so that an input control part of the device can be subjected to feedback control on a basis of individual input quantities of detected light or an electric signal obtained by conversion of this light. CONSTITUTION:When a laser beam 6 is projected from a light prejecting system 5 into a chemical liquid 2, the quantity of light, which corresponds to the size of foreign matters in the chemical liquid 2, of the laser beam is scattered, and a part of it is received through a slit (input control part) 7 by a photomultiplier 9 of a light receiving system 10. Light received by the photomultiplier 9 is converted to an electric quantity corresponding to the quantity of light, and this electric quantity is amplified by an amplifier 12 and passes an A/D converter 13 and is subjected to a prescribed operation in a control part 14, and dimensions and the quantity of foreign matters are displayed on a display device 15. The control part 14 controls a slit width adjusting mechanism 11 to make the slit 7 narrower if the quantity of received light in the photomultiplier 9 is excessive, and the control part 14 controls the mechanism 11 to make the slit 7 wider if the quantity of received light is small.,下面是Detector for foreign matter专利的具体信息内容。
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