Shape confirming/dimension measuring apparatus for photoresist film
专利汇可以提供Shape confirming/dimension measuring apparatus for photoresist film专利检索，专利查询，专利分析的服务。并且PURPOSE:To detect the shape and dimensions of a fine pattern with a high resolution by displaying the sectional shape of a photoresist film utilizing fluorescence released therefrom when it is irradiated with an excitation light. CONSTITUTION:An excitation light released from a visible laser 1 turns at the right angle with a mirror 26 and is set at the desired beam diameter with a stop 2. Then, after the beam diameter is expanded with a beam expander 3, the light is turned at the right angle again with a dichroic mirror 5 and converged to a specified range passing through an object lens 4 to locally irradiate sample 6. When a photoresist for the formation of a contact hole is irradiated with the excitation light near the hole thereof at a sufficient light energy density, fluorescence is released in the amount almost proportional to the thickness thereof. The object lens 4 transmits both reflected lights and fluorescence from the part irradiated with the excitation light but as the reflected lights are selectively reflected with the dichroic mirror 5, the image attributed to the fluorescence alone is formed as F1 image, which is directly observed with eyes through a display 13.，下面是Shape confirming/dimension measuring apparatus for photoresist film专利的具体信息内容。
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