External form inspecting device
专利汇可以提供External form inspecting device专利检索，专利查询，专利分析的服务。并且PURPOSE: To obtain a high missing detecting sensitivity in a short time by measuring a virtual pattern of a straight line and a regular square of an external form of an inspection object, and a geometrical distance of the external form of the inspection object, so that an evaluation function is generated from its result.
CONSTITUTION: A picture data of a semiconductor chip of an inspection object caught by a television camera 21 is processed by a processing circuit 22 and a software, and stored in an external form data file 23. Subsequently, a coordinate is read out successively from the file 23, and a geometrical feature of the semiconductor chip is derived by a computer 24. Next, basing on the geometrical feature of said semiconductor chip, a normal pattern is supposed, and a position shift in the X, Y and Q directions from its virtual pattern is calculated. When executing its calculation, it is executed so that the decision is performed by separating the part to which the polarity of a shift from the normal pattern is connected by positive, and the part to which said polarity is connected by negative, respectively. In this way, the inspection can be executed exactly.
COPYRIGHT: (C)1984,JPO&Japio，下面是External form inspecting device专利的具体信息内容。
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| 虚拟模型渲染方法及装置 | 2020-05-08 | 206 |
| 图像处理装置和方法 | 2020-05-12 | 486 |
| 虚拟仿真实训平台 | 2020-05-12 | 894 |
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