Detecting method for pattern faulty part
专利汇可以提供Detecting method for pattern faulty part专利检索，专利查询，专利分析的服务。并且PURPOSE: To ensure an assured detection of the faulty part even for the complicated pattern by quantizing three adjacent pellet patterns to from a bit pattern and then reversing the color tone of the bit pattern image to form a reversed image.
CONSTITUTION: Pellet patterns 2 formed in alignment to wafer 1 are picked up. Pattern A and B contains defect 3 and 4 respectively, and pattern C is normal. The half-tone part is adjusted to white or black with a picture process for each pattern in order to form bit pattern 5. The color tone of pattern 5 is reversed to form reversed image 6. Then A-inverted image 6 and B-bit pattern 5 form compound image 7, and thus white color 9 and 10 emerge at the black region to indicate the existence of defect. On the contrary, the black appears at full part with compound of A5 and B6, and is so with compound of C5 and B6. And white dot 10 appears with compound of B5 and C6,so it is known that white dot 9 and 10 indicate the defects of A and B respectively. Thus, the faulty part can be detected assuredly, also realizing an easy automatic detection
COPYRIGHT: (C)1979,JPO&Japio，下面是Detecting method for pattern faulty part专利的具体信息内容。
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