Production of insulated gate type field effect transistor
专利汇可以提供Production of insulated gate type field effect transistor专利检索，专利查询，专利分析的服务。并且PURPOSE: To increase the scale of integration by depositing a gate oxide film of a width slightly winder than the channel region to be obtained on a semiconductor substrate and forming a channel stopper in the substrate under the gate oxide film by using a mask of a width smaller than this.
CONSTITUTION: After a thick filed insulation film 22 is formed to the end part of a P type Si substrate 21, a thin gate insulation film 22 is deposited in the window 23 surrounded by this. At this time, the width W
1 of the window 23 is made at W
1 = W
0 +α which adds a mask alignment error component α to the channel width W
0 to be obtained in the final. Next, a conductive layer 24 such as of Mo, low resistance polycrystalline Si or other is deposited on the film 22 and a T-form Si
3 N
4 film of a width slightly smaller than that of the layer 24 and extending of the film 22 is formed thereon. Thereafter, P type impurity ions are implanted into the film 22 of a narrow width exposed in the window 23 to form a P type channel stopper 27. The mask 25 is then removed by leaving the width (d) along and N
+ type source and drain regions 28, 29 are respectively diffusion-formed on both sides of the conductive layer 24 thereunder.
COPYRIGHT: (C)1979,JPO&Japio，下面是Production of insulated gate type field effect transistor专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 水面舰船装备用数字多用表的退化建模与寿命预测方法 | 2020-05-11 | 302 |
| 表面安装式扬声器的多路径声壁耦合 | 2020-05-11 | 321 |
| 一种光学遥感相机成像全链路的仿真方法 | 2020-05-11 | 303 |
| 五金件的缺陷识别方法、系统及存储介质 | 2020-05-11 | 848 |
| 一种机械混合负压充氧机安装间距的确定方法 | 2020-05-08 | 294 |
| 太阳能电池片及其制备方法 | 2020-05-12 | 155 |
| 一种面向田块尺度作物生长监测的遥感影像时空融合方法 | 2020-05-12 | 594 |
| 一种基于多波长相位调制的拼接主镜共相误差探测方法 | 2020-05-12 | 644 |
| 一种涉及冶金领域钢液凝固过程中强制对流对AlN枝晶受力计算方法 | 2020-05-11 | 284 |
| 一种发动机叶片测量方法 | 2020-05-08 | 668 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
