Electrostatic capacity type load sensor and its manufacture
专利汇可以提供Electrostatic capacity type load sensor and its manufacture专利检索，专利查询，专利分析的服务。并且PURPOSE: To eliminate the fluctuation of the electrostatic capacity of the title sensor by forming a fixed electrode and dummy on an insulating fixing plate in the same thickness and installing an enclosing agent, such as glass, etc., and iso-elastic movable electrode plate to the fixing plate, and then, fixing the distance between the fixed electrode and movable electrode plate to a fixed state by heating.
CONSTITUTION: This electrostatic capacity type load sensor 1 is constituted in such a way that a fixed electrode 6 of Ag and Pd, ring-like dummy 3, and fixed electrode terminal are simultaneously printed on an alumina-made insulating fixing base plate 2 to the same thick ness, and then, a ring-like glass-made enclosing agent 5 is printed on the upper surface of the base plate 2 concentrically to the center of the electrode 6. Then a spacer 4 of a Ti plate is put on the dummy 3 and an iso-elastic movable electrode plate 7 is put on the spacer 4. After they are assembled as mentioned above, the whole body of the sensor 1 is heated so that the electrode plate 7 and base plate 2 are joined to the enclosing agent 5. After they are joined to the agent 5, the spacer 4 is removed and, thus, the sensor 1 is completed. Since the electrode 6 is formed together with the dummy 3 and the clearance between the electrode plate 7 and dummy 3 is decided by the thickness of the spacer 4, the fluctuation of the thickness of the dummy 3 can be reduced and, as a result, an electrostatic capacity type load sensor from which fluctuation of the electric capacity is eliminated can be obtained.
COPYRIGHT: (C)1989,JPO&Japio，下面是Electrostatic capacity type load sensor and its manufacture专利的具体信息内容。
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