Sampler of silicon melt
专利汇可以提供Sampler of silicon melt专利检索，专利查询，专利分析的服务。并且PURPOSE: To eliminate the need for cutting work of melt into thickness of a sample and to easily perform forming work of the sample by constituting the sampler of an inner and outer double-pipe structure and providing a flat part for sampling to the inner pipe in the sampler which is connected to a probe equipped with a vacuum pipeline and utilized.
CONSTITUTION: When silicon single crystal is obtained by a Czochralski process, silicon melt is sampled with a sampler which is connected to a probe equipped with a vacuum pipeline and the concn. of impurities contained in the silicon melt is measured. In this case, the sampler 1 is constituted of a double-pipe structure where in an outer pipe 2 and an inner pipe 3 made of quartz are joined in the base parts. The central part of the inner pipe 3 is formed of a shape having a flat space 3b.
COPYRIGHT: (C)1991,JPO&Japio，下面是Sampler of silicon melt专利的具体信息内容。
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