Processing apparatus with precisely controlled agitation
阅读：73发布：2023-05-14
专利汇可以提供Processing apparatus with precisely controlled agitation专利检索，专利查询，专利分析的服务。并且Apparatus for processing semiconductor wafers while providing precise control over the rate of agitation of processing solution in contact with the wafers. The invention has utility in several processing operations on semiconductor wafers such as developing, photolithographic etching and bubble cleaning. The apparatus includes a tank for holding a quantity of processing solution. A sparger, placed in the tank, has a plurality of apertures for releasing a precisely controlled amount of an inert gas such as nitrogen into the processing solution. A carrier loaded with a plurality of semiconductor wafers is placed on top of the sparger. During processing a precisely controlled amount of gas is released through the apertures in the sparger and bubbles up through the processing solution in intimate contact with the semiconductor wafers. This bubbling action provides precisely controlled agitation of the processing solution in intimate contact with the wafers.，下面是Processing apparatus with precisely controlled agitation专利的具体信息内容。
1. Apparatus for precisely controlling the agitation of processing solution in intimate contact with semiconductor wafer components immersed in the processing solution and being treated by the processing solution, and thereby precisely controlling the rate of processing of the components, and comprising: a. a container for holding a quantity of processing solution; b. means for holding a plurality of components for immersion in processing solution located in said container and including a semiconductor wafer carrier means having a plurality of separate compartments located in an array of rows and columns, whereby individual components may be inserted into said individual compartments, and the tray with the components may be inserted into the processing solution in said container, whereby the components may be processed by the processing solution; c. means for releasing a precisely controlled amount of gas into the processing solution and below the components and including a plurality of apertures located below the components when the components are immersed in processing solution in said container, and a timer means for indicating the length of time during which gas is bieng released into the processing solution, whereby the controlled amount of released gas may bubble up through the processing solution in intimate contact with the components and provide a precisely controlled agitation of the processing solution in intimate contact with the components.
2. Apparatus as set forth in claim 1 wherein said means for releasing a controlled amount of gas into the processing solution includes a flow meter for controlling the rate of release of gas into the processing solution.
3. Apparatus as set forth in claim 2 wherein said means for releasing a controlled amount of gas into the processing solution includes a sparger means which may be inserted into and placed on the bottom of said container, said sparger means having said plurality of apertures formed therein.
4. Apparatus as set forth in claim 3 wherein the apertures in said sparger means are located relative to the compartments in said tray means such that when the tray means is placed on top of the sparger means the apertures in said tray means will form rows on each side of said rows of compartments, whereby the rows of apertures on each side of a row of compartments will provide controlled agitation of processing solution on both sides of components located in said compartments.
5. Apparatus as set forth in claim 1 wherein said means for releasing a controlled amount of gas into the processing solution includes a sparger means which may be inserted into and placed on the bottom of said container, said sparger means having said plurality of apertures formed therein.
6. Apparatus as set forth in claim 5 wherein the apertures in said sparger means are located relative to the compartments in said tray means such that when the tray means is placed on top of the sparger means the apertures in said tray means will form rows on each side of said rows of compartments, whereby the rows of apertures on each side of a row of compartments will provide controlled agitation of processing solution on both sides of compartments located in said compartments.
7. Apparatus for precisely controlling the agitation of processing solution in intimate contact with semiconductor components immersed in the processing solution and being treated by the processing solution, and thereby precisely controlling the rate of processing of the components, and comprising: a. a container for holding a quantity of processing solution; b. means for holding a plurality of componenTs for immersion in processing solution located in said container and including a semiconductor component carrier means having a plurality of separate compartments located in an array of rows and columns, whereby individual components may be inserted into said individual compartments, and the tray with the components may be inserted into the processing solution in said container, whereby the components may be processed by the processing solution; c. means for releasing a precisely controlled amount of gas into the processing solution and below the components and including a plurality of apertures located below the components when the components are immersed in processing solution in said container, and a flow meter means for precisely controlling the flow of gas released into the processing solution, whereby the controlled amount of released gas may bubble up through the processing solution in intimate contact with the components and provide a precisely controlled agitation of the processing solution in intimate contact with the components.
8. Apparatus as set forth in claim 7 wherein said means for releasing a precisely controlled amount of gas into the processing solution includes a sparger means which may be inserted into and placed on the bottom of said container, said sparger means having said plurality of apertures formed therein.
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