Production of semiconductor device
专利汇可以提供Production of semiconductor device专利检索，专利查询，专利分析的服务。并且PURPOSE:To prevent inter-electrode short-circuit by removing an oxide film by ion etching after etching a conductive layer by gas, which is generated by dissociating gas including F, when the gate oxide film and the conductive layer on this film are etched to constitute an electrode. CONSTITUTION:Poly-Si 32 is laminated on gate oxide film 31 of p-type Si substrate 30 and is make conductive by phosphorus diffusion and is subjected to plasma etching by gas generated by dissociating gas including F through resistor mask 33, thereby generating an eaves part in poly-Si 34. When exposed oxide films 35a to 35c are removed by ion etching with the resistor mask left as it is, no eaves part is generated, and resistor mask 33 and film 31 are formed in self-matching. The mask is removed to form second gate oxide films 37a to 37c and oxide films 38a to 38c. The eaves width of layer 34 is set properly to be able to form films 38 and 37 simultaneously independently, so that no sharply scooped part is generated in electrode 34. Next, poly-Si electrodes 39a to 39c are formed. By this constitution, inter-electrode short-circuit can be prevented.，下面是Production of semiconductor device专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 一种独立光伏一体化车站系统 | 2020-05-08 | 569 |
| 一种基于ZigBee的智能分类垃圾桶控制系统 | 2020-05-08 | 893 |
| 一种光利用效率高的太阳能发电装置 | 2020-05-11 | 794 |
| 含电池储能系统的主动配电网短期有功优化方法 | 2020-05-11 | 537 |
| 一种光伏一体化屋面结构及施工方法 | 2020-05-12 | 405 |
| 一种中心锁及帐篷 | 2020-05-11 | 260 |
| 太阳能自发光栏板 | 2020-05-11 | 860 |
| 一种实用的户外便检式JP柜 | 2020-05-11 | 306 |
| 一种装配式保温房 | 2020-05-08 | 967 |
| 一种太阳能光伏驱动通风蒸发降温屋面 | 2020-05-12 | 516 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
-
4 一种中药晾晒房
-
5 一种屋顶除雪装置
-
10 一种方便组装的配电柜
