序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
41 태양전지용 CIGSSe 박막 및 이의 제조방법, 이를 이용한 태양전지 KR1020150056833 2015-04-22 KR1020160125828A 2016-11-01 민병권; 황윤정; 박세진
본발명은태양전지용 CIGSSe 박막및 이의제조방법, 이를이용한태양전지에관한것으로, 더욱상세하게는오제(Auger) 전자분광법의분석결과, 상기박막의표면에서깊이방향으로황 함량의극소값지점까지는황의피크세기(intensity)가감소하는것을특징으로하는태양전지용 CIGSSe 박막을제조하여, 상기 CIGSSe 박막내의밴드갭을제어함으로써상기 CIGSSe 박막을포함하는태양전지는광전변환효율을개선시키는데탁월한효과를나타낸다.
42 METHOD AND INSTRUMENT FOR CHEMICAL DEFECT CHARACTERIZATION IN HIGH VACUUM US12032526 2008-02-15 US20080197277A1 2008-08-21 Mehran Nasser-Ghodsi; Ming Lun Yu; Stuart Friedman; Gabor Toth
A method and the instrument for characterization of the defects on a surface with Auger electron spectroscopy in a high vacuum environment are disclosed. Defects on the surface of a sample may be characterized with Auger electron spectroscopy in a high vacuum environment at a pressure of about 10−7 Torr to 10−6 Torr.
43 電池容器用表面処理鋼板、電池容器および電池 PCT/JP2012/061192 2012-04-26 WO2012147843A1 2012-11-01 友森 龍夫; 山根 栄治; 堀江 慎一郎; 吉岡 興

 電池容器内面となる面の最表面に、ニッケル-コバルト合金層が形成されてなる電池容器用表面処理鋼板であって、前記ニッケル-コバルト合金層の表面におけるオージェ電子分光分析によるCo/Ni値が0.1~1.5の範囲であることを特徴とする電池容器用表面処理鋼板を提供する。

44 Auger electron spectroscopy JP25558792 1992-08-31 JPH0676787A 1994-03-18 KASAHARA MASAKI; WATANABE SHIGEMITSU; SAKAGUCHI SHINICHI
PURPOSE:To provide Auger electron spectroscopy in which a correct Auger spectrum can be obtained for a wide range from the low energy side to the high energy side by composing it in such a way that high resolution can be provided on the low energy side, and that a signal-to-noise ratio is favorable on the high energy side. CONSTITUTION:In an Auger electron spectroscopy, an electron beam 12 is radiated to a solid surface 11 which is to be surface analyzed, Auger electrons 13 emitted from the solid surface by impact of the electron beam are introduced to an electric field by a voltage of a constant sweep voltage added by a modulation voltage(v), the electrons passing within a constant angular range are detected, and for detection outputs, only the outputs synchronized with a frequency of the modulation voltage are phase-detected by a lock-in amplifier, so an Auger spectrum is obtained, where the Auger electron spectroscopy is composed in such a way that the modulation voltage is changeable to be relatively low when analysis energy is low, and relatively high when the analysis energy is high.
45 METHOD OF NANO THIN FILM THICKNESS MEASUREMENT BY AUGER ELECTRON SPECTRSCOPY PCT/CN2004/001529 2004-12-27 WO2006069469A1 2006-07-06 JIANG, Zhichang; LI, Shandan; KAM, Yuenkwan; LIU, Yiwei

A system and method for measuring the thickness of an ultra-thin multi-layer film on a substrate is disclosed. A physical model of an ultra-thin multilayer structure and Auger electron emission from the nano-multilayer structure is built. A mathematical model for the Auger Electron Spectroscopy (AES) measurement of the multilayer thin film thickness is derived according to the physical model. Auger electron spectroscopy (AES) is first performed on a series of calibration samples. The results are entered into the mathematical model to determine the parameters in the mathematical equation. The parameters may be calibrated by the correlation measurements of the alternate techniques. AES analysis is performed on the ultra-thin multi-layer film structure. The results are entered into the mathematical model and the thickness is calculated.

46 電気電子部品用複合材料およびそれを用いた電気電子部品 PCT/JP2009/061429 2009-06-23 WO2009157456A1 2009-12-30 菅原 親人; 座間 悟; 橘 昭頼

 電気電子部品の材料として用いられる、少なくとも表面がCuまたはCu合金である金属基材上の少なくとも一部に絶縁皮膜が設けられた電気電子部品用複合材料であって、前記金属基材と前記絶縁皮膜との間にNiまたはNi合金にCuが拡散された金属層が介在し、前記金属層の最表面をオージェ電子分光測定した際のNiに対するCuの原子数比率(Cu/Ni)が0.005以上である電気電子部品用複合材料。

47 表面処理鋼板、燃料パイプおよび電池缶 PCT/JP2012/066641 2012-06-29 WO2013002356A1 2013-01-03 友森 龍夫; 吉岡 興

 最表面に、鉄-ニッケル合金層が形成されてなる表面処理鋼板であって、前記鉄-ニッケル合金層の表面におけるオージェ電子分光分析によるFe/Ni値が0.3~2.0の範囲であることを特徴とする表面処理鋼板を提供する。本発明によれば、自動車用の燃料油など各種燃料に暴露された場合における、孔食の発生が有効に抑制され、かつ、優れた耐食性を有する表面処理鋼板を提供することができる。

48 Device for analyzing specimen JP11949680 1980-08-29 JPS5744842A 1982-03-13 SASAKI SUMIO; KOJIMA KENJI; MUROTA MASAO; ITOU TAKASHI
PURPOSE:To perform Auger electron spectroscopy and electro spectronscopy for cheminal analysis (ESCA) with good operability in a simple structure by providing an X-ray transmitting window which blocks an electron beam so that it can be freely inserted and removed. CONSTITUTION:An X-ray transmitting filter 11 which blocks the elctron beam is provided between an anticathode 7 of an X-ray source which also serves as an electron beam source and a specimen 3 via a moving mechanism 12 so that the filter can be freely inserted and removed. When said filter 11 is inserted the ESCA electron spectroscopy utilizing the irradiation of the X-ray having a specified wavelength is perfomred. When the filter 11 is removed, the Auger electron spectroscopy utilizing the electron beam containing the X-ray is performed. Therefore, the Auger and ESCA electron spectroscopies can be selectively performed by the easy operation in the simple constitution utilizing a pair of the beam and ray sources.
49 Method of measuring sensitivity coefficient of auger electron spectroscopy JP2006033435 2006-02-10 JP2007212328A 2007-08-23 IDA ISATO; NOMOTO HIROTAKA
PROBLEM TO BE SOLVED: To provide a method of measuring sensitivity of coefficient of the Auger electron spectroscopy capable of correctly obtaining the sensitivity coefficient at the time of quantitative calculation: in the AES method regarding the method of sensitivity coefficient measuring method of the Auger electron spectroscopic analyzing method of the Auger electron spectro-analyzer for analyzing the chemical state of a solid surface. SOLUTION: The Auger electron spectroscopic analyzer for detecting Auger electron by scanning with an electron beam is characterized in that step (1) ≥2 kinds of solid material of single elements are arranged in the scanning range of the electron beam; step (2) the spectra in the scanning range are measured and the intensities of the elements constituting the solid materials are obtained; step (3) the areal ratios of the solid materials in the scanning area are obtained; the step (4) the sensitive factors between each element from the intensities of the elements and the areal ratios of the solid body materials are obtained. COPYRIGHT: (C)2007,JPO&INPIT
50 Measuring method of element in vicinity of interface by auger electron spectroscopy JP2013040609 2013-03-01 JP2014169881A 2014-09-18 OKUMURA YOJI
PROBLEM TO BE SOLVED: To provide a method for analyzing a composition in the vicinity of an interface, capable of accurately analyzing a composition in the vicinity of an interface even in the vicinity of the interface having dissolution generated between two phases contacted with each other using Auger electron spectroscopy.SOLUTION: The method for analyzing a composition in the vicinity of an interface using Auger electron spectroscopy comprises: acquiring a point analysis profile or a line analysis profile derived from only scattering of incident electrons as a reference line; acquiring a point analysis profile or a line analysis profile having influence of diffusion of elements and scattering of incident electrons as a measurement line; and obtaining a point analysis profile or a line analysis profile derived from only the diffusion of elements by subtracting the reference line from the measurement line.
51 연성동박적층필름 및 그 제조방법 KR1020150142004 2015-10-12 KR1020170042871A 2017-04-20 김경각; 신충환; 김영호; 성하섭; 안기원; 김정기
높은신호전송속도를나타내는미세선폭의 FPC/COF를구현할수 있을뿐만아니라우수한박리강도를갖는연성동박적층필름및 그제조방법이개시된다. 본발명의연성동박적층필름은, 비전도성고분자기재및 상기비전도성고분자기재상의금속층을포함하되, 상기비전도성고분자기재로부터상기금속층(200)을박리시킨후 상기금속층의박리면에대하여오제전자분광법(AES)을통해 5 nm/min의스퍼터링속도(실리콘기준)로깊이분석을수행할때, 금속-탄소결합피크(Me-C bond peak)가 40초이상동안나타난다.
52 Method for predicting the performance of cathode materials US490994 1983-05-02 US4492866A 1985-01-08 George A. Haas; Arnold Shih; Christie R. K. Marrian
A method for predicting the proclivity of various materials to emit electrons, and thus their suitability for cathode fabrication. The method includes steps to determine the surface work function lowering by analyzing and comparing the Auger electron-energy spectra of a plurality of sample materials.
53 Method for elemental analysis using auger electron spectral equipment JP2005310909 2005-10-26 JP2006153858A 2006-06-15 ISOO KOTARO; TANAKA KOZO; HAMAMATSU HIROSHI
PROBLEM TO BE SOLVED: To provide a method for elemental analysis, which uses an Auger electron spectrometer, equipped with a CMA (cylindrical mirror analyzer) detector and a low-speed argon ion gun, and has fewer quantitative errors, in comparison with the conventional methods. SOLUTION: In the Auger electron spectrometer equipped with the CMA detector and the low-speed argon ion gun which are disposed in coaxial alignment with an electron gun, an ion etching process is carried out by using the low-speed argon iron gun, and then a single crystal containing sample is irradiated with electrons, to detect Auger electrons therefrom by using the CMA detector. In the method for the ultimate analysis, the crossing angle of the axial extension line of the electron gun and the normal line of a sample-setting surface, which passes through the crossing point of the sample-setting surface and the axial extension line of the electron gun, and/or the rotation angle of the sample-setting surface about the normal line of the sample-setting surface, are adjusted such that the variations in the intensity of signals becomes small, when varying the crossing angle and/or the rotation angle. Then, the element contained in the sample is determined quantitatively from detected Auger electrons. COPYRIGHT: (C)2006,JPO&NCIPI
54 半導体装置 JP2014137200 2014-07-02 JP2016015424A 2016-01-28 貝沼 隆浩; 五十嵐 崇; 稲川 浩巳; 新井 岳; 藤井 裕二; 岡村 孝宏; 豊田 久志
【課題】SiC基板と電極の接触抵抗を小さいものにする。
【解決手段】チタン層TL側からSiC基板SCS側に向かう方向にシリサイド層SLDをAES(Auger Electron Spectroscopy)スパッタにより測定した場合において、シリサイド層SLDのデプスプロファイルが占めるスパッタ時間をtsとする。この場合、シリサイド層SLDのチタン層TL側からのスパッタ時間が0.4ts以上ts以下の範囲のデプスプロファイルは、AESスパッタにより測定されるチタンがAESスパッタにより測定される全原子に対して5原子%以上となる領域を含んでいる。
【選択図】図9
55 Spectral analysis method for energy of charged particles JP22714998 1998-08-11 JP2000028556A 2000-01-28 SATORI KOTARO
PROBLEM TO BE SOLVED: To measure the charge of a sample under a controlled condition to provide an energy spectrum in an accurate position with a stable peak shape all the time, when the energy of a charged particle is dispersed into its spectral components to be measured. SOLUTION: A sample is pulverized, and resulting pulverized powder 1 is used for analysis in a state that the powder 1 is embedded into a conductive material 2, in a energy spectral analysis method of a charged particle where energy of the charged particle is dispersed into its spectral components in an Auger electron spectroscopy or an X-ray electron spectroscopy to be measured.
56 Method for creating intergranular frecture JP4945291 1991-03-14 JPH04285187A 1992-10-09 MORISAWA JUNICHIRO
PURPOSE: To efficiently create an intergranular frecture in a sensitized material sample of an austenic Fe-Ni-Cr alloy to be used for Auger electronic spectroscopy, etc. CONSTITUTION: A low-speed tensile test piece made of the sample is used as a cathode, electrolyzed in 1N sulfuric acid contg. sodium arsenite and charged with hydrogen. The test piece is heated to discharge hydrogen, the process is repeated to accelerate intergranular embrittlement and then to break the teat piece, and an intergranular frecture is created. The intergranular frecture for the analysis is efficiently created by this method. COPYRIGHT: (C)1992,JPO&Japio
57 IRON POWDER FOR POWDER METALLURGY, PROCESS FOR PRODUCING THE SAME, AND IRON-BASE POWDER MIXTURE FOR POWDER METALLURGY PCT/JP1996003007 1996-10-17 WO1997014523A1 1997-04-24 KAWASAKI STEEL CORPORATION; MITSUBISHI MATERIALS CORPORATION
Iron powder and iron-base powder mixture for powder metallurgy, which can provide sinters excellent in machinability and wear resistance. The iron powder contains 0.03-0.3 wt.% boron, at most 0.07 wt.% chromium, less than 0.3 wt.% manganese, and the balance consisting of iron and unavoidable impurities, and has an intensity ratio of boron to iron of at least 0.05 in the spectrum of the powder surface as determined by Auger electron spectroscopy. The powder serves to increase the amount of graphite remaining in sinters to thereby improve the machinability and wear resistance thereof. Another iron powder is prepared by adding sulfur, selenium, tellurium, molybdenum or the like to the above powder. These powders are mixed with MoO3 or WO3 powder to develop a so-called iron-base powder mixture. It is produced by water-atomizing the above powders while adjusting the oxygen content of molten steel to 100 ppm or below.
58 Cleaning medium EP05019709.4 2005-09-09 EP1640974A2 2006-03-29 Ishiguro, Tadashi, Fuji Photo Film Co ., Ltd

A cleaning medium including: a non-magnetic back layer; a non-magnetic support; and a cleaning layer containing a ferromagnetic powder and a binder, in this order, wherein a surface of the cleaning layer has a C/Fe peak ratio of from 10 to 20, a Cl/Fe peak ratio of not more than 0.2, and an N/Fe peak ratio of from 0.03 to 0.1 according to an Auger electron spectroscopy.

59 高磁束密度無方向性電磁鋼板およびモータ PCT/JP2014/071184 2014-08-11 WO2015025759A1 2015-02-26 中西 匡; 小関 新司; 尾田 善彦; 戸田 広朗

 mass%で、C:0.010%以下、Si:1.0~7.0%、Mn:0.001~3.0%、sol.Al:0.0001~3.5%、P:0.01~0.2%、S:0.010%以下、N:0.010%以下を含有し、粒界破断面をオージェ電子分光法で分析して得たオージェ微分スペクトルの電子エネルギー700eV近傍におけるFeのpeak-peak高さFe700に対する、電子エネルギー120eV近傍におけるPのpeak-peak高さP120の比(P120/Fe700)が0.1以上であり、かつ、板厚が0.10~0.50mmである無方向性電磁鋼板と、その無方向性電磁鋼板を鉄心に用いたモータ。

60 芳香族ポリカーボネート樹脂の製造方法 PCT/JP2008/002239 2008-08-19 WO2009034680A1 2009-03-19 内村竜次; 岩木光地

 フィルター内の滞留劣化を防止し、異物やフェノール量の少ない芳香族ポリカーボネート樹脂の製造方法を提供する。  溶融状態の芳香族ポリカーボネート樹脂をポリマーフィルターで処理して精製芳香族ポリカーボネート樹脂を製造するに当たり、ポリマーフィルターとして、X線光電子分光法によるフィルター最表面の鉄原子濃度に対するクロム原子濃度の比(Cr/Fe)が1.5以上であるフィルターを使用する。本発明の好ましい態様においては、ポリマーフィルターとして、オージェ電子分光法によるフィルター最表面の炭素膜の膜厚が10nm以下であり、且つ深さ方向の酸化皮膜の膜厚が100nm以上であるフィルターを使用する。

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