| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 1 | 一种宽光谱部分相干衍射计算成像方法及系统 | CN202311198277.5 | 2023-09-15 | CN117233147A | 2023-12-15 | 谷洪刚; 刘世元; 陈创创 |
| 本发明提供了一种宽光谱部分相干衍射计算成像方法及系统，属于相干衍射计算成像技术领域，方法包括：将宽光谱光束入射至待测样品，根据单色光束对应衍射光谱点扩散传输矩阵和待测样品下夫琅禾费衍射远场宽光谱部分相干衍射光强分布，建立宽光谱衍射图像单色化矩阵方程，求出单色化衍射光强分布；将单色化衍射光强分布代入相干衍射计算成像算法中，输出相干衍射计算成像的重构结果。本发明抑制宽光谱衍射带来的退相干现象，提升宽光谱部分相干衍射计算成像质量和收敛鲁棒性。 | ||||||
| 2 | 一种高质量鲁棒部分相干成像方法及装置 | CN202110524638.5 | 2021-05-13 | CN113391457B | 2022-09-20 | 尹雨; 黎鹏; 朱时军; 王清华 |
| 本发明涉及一种高质量鲁棒部分相干成像方法及装置，该方法将部分相干场表示为互不相关的完全相干场叠加，通过调控交叉谱密度函数中的相关参数以及目标强度灰度矩阵，在远场处对所需要的目标强度进行成像；通过将交叉谱密度函数离散化表示为不同模式的非相干叠加的形式，在数字微镜器件或者空间光调制器上连续播放不同的全息图，来实现不同模式的非相干叠加，从而高效地对所需要的目标进行成像。成像装置结构简单，并且实验能量利用率较高，鲁棒性好，具有非常实用的价值。 | ||||||
| 3 | 一种高质量鲁棒部分相干成像方法及装置 | CN202110524638.5 | 2021-05-13 | CN113391457A | 2021-09-14 | 尹雨; 黎鹏; 朱时军; 王清华 |
| 本发明涉及一种高质量鲁棒部分相干成像方法及装置，该方法将部分相干场表示为互不相关的完全相干场叠加，通过调控交叉谱密度函数中的相关参数以及目标强度灰度矩阵，在远场处对所需要的目标强度进行成像；通过将交叉谱密度函数离散化表示为不同模式的非相干叠加的形式，在数字微镜器件或者空间光调制器上连续播放不同的全息图，来实现不同模式的非相干叠加，从而高效地对所需要的目标进行成像。成像装置结构简单，并且实验能量利用率较高，鲁棒性好，具有非常实用的价值。 | ||||||
| 4 | 一种部分相干偏振同步相移数字全息显微系统及成像方法 | CN202311783145.9 | 2023-12-22 | CN117948877A | 2024-04-30 | 王越; 张昕宇; 席特立; 邵晓鹏; 郭成飞 |
| 本发明涉及一种光学显微测量系统及成像方法，具体涉及一种部分相干偏振同步相移数字全息显微系统及成像方法。解决了现有基于LED的部分相干离轴数字全息显微系统存在系统结构复杂、调试难度大、能量利用率低、空间带宽积受限以及成像分辨率低等技术问题。本发明系统包括棱镜、照明光模块、目标光模块、参考光模块和成像模块；成像模块包括消色差四分之一波片和像素偏振相机；照明光模块出射的部分相干光束入射至棱镜内进行反射和透射，反射光经目标光模块形成目标光，透射光经参考光模块形成参考光，目标光和参考光分别沿各自的形成光路返回棱镜，并同步入射至消色差四分之一波片，经像素偏振相机记录得到空间复用的相移干涉全息图案。 | ||||||
| 5 | 基于部分相干编码照明的大视场高分辨率显微成像方法 | CN202410052467.4 | 2024-01-13 | CN117850016A | 2024-04-09 | 左超; 陈超俊; 孙佳嵩; 陈钱; 束业峰; 范瑶 |
| 本发明公开了一种基于部分相干编码照明的大视场高分辨率显微成像方法。该方法使用可编程LED阵列作为照明光源，利用四个非对称照明图案和n个同心圆扇形照明图案，分别获取低数值孔径下物体的明暗场强度图像；利用差分相衬算法初始化物体的复振幅，将暗场强度图像作为强度约束，通过多次迭代更新，恢复物体的高频信息，从而实现大视场高分辨率显微成像。该发明，将高角度部分相干暗场照明与明场照明相结合，可在不降低空间分辨率的情况下记录大视场图像，为生命科学与生物医学研究提供了一种非侵入、高性能、低成本、定量化、简单普适的高通量影像学工具。 | ||||||
| 6 | 光栅部分相干成像系统的斯托克斯参数测量装置和方法 | CN202310518307.X | 2023-05-10 | CN116625511A | 2023-08-22 | 胡小英; 刘卫国; 李昊; 孙雪平; 刘爽; 景心怡; 王炜 |
| 本发明涉及一种光栅部分相干成像系统的斯托克斯参数测量装置和方法，本发明根据测量光栅部分相干成像系统中的光强度计算描述光偏振态的斯托克斯参数，该测量装置包括部分相干光起偏光路、检偏光路和传递光路；起偏光路包括非相干光源、滤波片、扩束准直器、四分之一波片和线偏振片，传递光路包括孔径光阑、光栅物体和透镜，检偏光路有四分之一波片、线偏振片和CMOS相机。本发明装置结构简单，操作简便，设备成本低，本发明方法不但扩展了信息维度，且成像系统分辨率得到提高，成像系统对环境要求降低，可扩大已确定系统的视场角，能量利用率高。 | ||||||
| 7 | 一种基于部分相干光照明的定量相衬显微成像装置 | CN202310107904.3 | 2023-02-13 | CN116300364A | 2023-06-23 | 郑娟娟; 王阳; 郜鹏; 卓可群; 马英; 安莎; 刘旻 |
| 本发明公开了一种基于部分相干光照明的定量相衬显微成像装置，包括沿光路方向依次设置的部分相干照明模块、显微成像系统、频谱调制模块和图像采集模块，其中，部分相干照明模块用于产生部分相干光以作为照明光；显微成像系统用于利用部分相干光获取样品的散射信号并对散射信号进行放大，获得具有样品信息的光场分布；频谱调制模块用于对来自显微成像系统的入射光频谱分别进行零频分量和高频分量的调制；图像采集模块用于采集经过频谱调制模块调制的零频分量和高频分量干涉所产生的全息图。本发明利用空间光调制器对物光的零频分量引入不同相位值来实现相移，记录物光零频分量和高频分量之间的相移相衬图样，最终可以再现出样品定量的相位分布。 | ||||||
| 8 | 부분 간섭성을 공간적으로 조정가능한 광학소자, 이미징 장치 및 포토리소그래피 장치 | KR1019970062663 | 1997-11-25 | KR100517215B1 | 2005-12-06 | 잘라틴그래그; 맥컬로우앤드류더블유. |
| 본 발명은 반도체 제조용 포토리소그래피에 사용되는 조명 장치에 관한 것으로서, 상이한 조명 영역이 레티클상의 상이한 형상 패턴 영역과 정합되게 하는 어레이 광학소자를 지니는 조명 장치에 관한 것이다. 상기 어레이 광학소자로서는 필터, 회절 광학소자, 또는 마이크로렌즈 어레이가 사용될 수 있으며, 상기 어레이 광학소자의 조명 영역에 의해 특히 4중극(重極;quadrupole), 원형(annular), 또는 톱 해트(top hat)형과 같은 상이한 유형의 조명 성질 또는 특성이 얻어질 수 있다. 상기 조명 영역 각각은 감광 레지스트로 도포된 웨이퍼의 노광을 최적화시키도록 레티클상의 각각의 패턴 영역에 정합 또는 대응된다. 본 발명의 광학소자는 특정 레티클의 독특한 특성을 종래의 조명 장치에 적응시키는 데 사용될 수 있다. 더욱이, 포토리소그래피 장치의 광학기기에서의 어떤 불완전성이 있더라도 상기 광학소자에 의해 보완될 수 있다. 이로 인해 품질이 개선되고 수율(收率)이 증가되면서 피처 크기(feature size)가 감소된 반도체소자의 제조가 용이하게 된다. | ||||||
| 9 | 부분 간섭성을 공간적으로 조정가능한 광학소자, 이미징 장치 및 포토리소그래피 장치 | KR1019970062663 | 1997-11-25 | KR1019980042721A | 1998-08-17 | 잘라틴그래그; 맥컬로우앤드류더블유. |
| 본 발명은 반도체 제조용 포토리소그래피에 사용되는 광조사 시스템에 관한 것으로서 상이한 광조사 영역을 구비한 광학 소자의 배치를 갖고 있어서 레티클 상에 상이한 기하 구조 패턴 영역에 잘 맞추어진다. 광학 소자의 배치는 필터, 회절 광학 소자 또는 상이한 타입의 광조사 특성 또는 쿼드러폴, 환상 또는 다른 것들 중의 상부 모자와 같은 성격을 산출할 수 있는 광조사 영역을 구비하는 마이크로렌즈가 될 수 있다. 광조사 영역의 각각은 레티클 상의 각각의 패턴 영역에 잘 맞추어지거나 대응하여 감광성 레지스트로 도포된 웨이퍼의 노광을 최적화시킬 수 있게 된다. 본 발명에 따른 광학 소자는 특정한 레티클의 독특한 특성에 관한 종래의 광조사 시스템을 종합하는데 사용될 수 있다. 더우기, 포토리소그래피 시스템의 광학체의 불완전함은 광학 소자에 의해서 보완될 수 있다. 이것은 크기가 감소한 형태의 반도체 디바이스의 제조 능력을 향상시키고 질을 개선시킬 뿐만 아니라 생산량을 증가시킨다. | ||||||
| 10 | Adjustment of the partial coherence of the light energy in an imaging system | US09676594 | 2000-09-29 | US06611387B1 | 2003-08-26 | Michael Goldstein; John M. Urata |
| The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence. | ||||||
| 11 | Partially coherent imaging for large-aperture phased arrays | US387513 | 1995-02-13 | US5476098A | 1995-12-19 | Matthew O'Donnell |
| Ultrasonic imaging performed with a large aperture phased array employs partially coherent processing to provide an improved real-time ultrasound image compared to that obtainable using either fully coherent or fully incoherent processing. Partially coherent processing is achieved by computing different sums across the imaging aperture and using a weighted total of the computed sums to generate a real-time image, enabling the operator to choose the extent of coherent summation versus incoherent summation across the aperture. Since coherent summation affects spatial resolution and incoherent summation affects contrast resolution, a trade-off between spatial and contrast resolution results in an optimal image for a given application. | ||||||
| 12 | Adjustment of the partial coherence of the light energy in an imaging system | US10460419 | 2003-06-11 | US20040008424A1 | 2004-01-15 | Michael Goldstein; John M. Urata |
| The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence. | ||||||
| 13 | Apparatus for adjustment of partial coherence of light energy in an imaging system | US10460419 | 2003-06-11 | US07139135B2 | 2006-11-21 | Michael Goldstein; John M. Urata |
| The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence. | ||||||
| 14 | APPARATUS AND METHOD FOR IMAGING ANTERIOR EYE PART BY OPTICAL COHERENCE TOMOGRAPHY | US12331752 | 2008-12-10 | US20090149742A1 | 2009-06-11 | Chihiro KATO; Keiichiro Okamoto; Kenichi Hayashi; Hiromu Watanabe |
| An optical coherence tomography (OCT) anterior eye part imaging apparatus includes a tomographic image obtaining unit obtaining a tomographic image of an anterior eye part of subject's eye in a depth direction by optical coherence tomography, an imaging unit imaging a frontal image of subject's eye, a display unit displaying the image of subject's eye, a corneal apex location detecting unit detecting a location of subject's eye, an alignment unit moving an apparatus body relative to the holder so that the location of corneal apex corresponds with a predetermined image obtaining location, a designating unit designating an area or a location where the tomographic image is obtained on subject's frontal image displayed on the display unit, and a scan line setting unit setting a scan line in the tomographic image obtaining unit on a straight line passing the corneal apex according to the designated area or location. | ||||||
| 15 | IMAGING SYSTEM AND METHOD USING PARTIAL-COHERENCE SPECKLE INTERFERENCE TOMOGRAPHY | US12751298 | 2010-03-31 | US20110242285A1 | 2011-10-06 | Robert W. BYREN |
| A system for generating an image of contoured surface includes a light source that is configured to project an electromagnetic radiation beam onto the contoured surface, wherein the projected beam generates first radiation reflected from a first portion of the contoured surface to form a speckle pattern, and second radiation reflected from a second portion of the contoured surface which is substantially uniform in intensity. The reflected first and second reflected radiation is received by an optical detector, and may be processed. The processing is configured to (1) generate a plurality of images from the first and second reflected radiation, with each image being generated using different coherence length electromagnetic radiation from the light source, and (2) generate a 3-D image of the contoured surface from the plurality of images. Methods for generating a 3-D image of a contoured surface are also disclosed. | ||||||
| 16 | Imaging system and method using partial-coherence speckle interference tomography | US12751298 | 2010-03-31 | US08780182B2 | 2014-07-15 | Robert W. Byren |
| A system for generating an image of contoured surface includes a light source that is configured to project an electromagnetic radiation beam onto the contoured surface, wherein the projected beam generates first radiation reflected from a first portion of the contoured surface to form a speckle pattern, and second radiation reflected from a second portion of the contoured surface which is substantially uniform in intensity. The reflected first and second reflected radiation is received by an optical detector, and may be processed. The processing is configured to (1) generate a plurality of images from the first and second reflected radiation, with each image being generated using different coherence length electromagnetic radiation from the light source, and (2) generate a 3-D image of the contoured surface from the plurality of images. Methods for generating a 3-D image of a contoured surface are also disclosed. | ||||||
| 17 | Apparatus and method for imaging anterior eye part by optical coherence tomography | US12331752 | 2008-12-10 | US08265735B2 | 2012-09-11 | Chihiro Kato; Keiichiro Okamoto; Kenichi Hayashi; Hiromu Watanabe |
| An optical coherence tomography (OCT) anterior eye part imaging apparatus includes a tomographic image obtaining unit obtaining a tomographic image of an anterior eye part of subject's eye in a depth direction by optical coherence tomography, an imaging unit imaging a frontal image of subject's eye, a display unit displaying the image of subject's eye, a corneal apex location detecting unit detecting a location of subject's eye, an alignment unit moving an apparatus body relative to the holder so that the location of corneal apex corresponds with a predetermined image obtaining location, a designating unit designating an area or a location where the tomographic image is obtained on subject's frontal image displayed on the display unit, and a scan line setting unit setting a scan line in the tomographic image obtaining unit on a straight line passing the corneal apex according to the designated area or location. | ||||||
| 18 | 一种调节光学成像系统相干性的方法 | CN202310570399.6 | 2023-05-19 | CN116626889A | 2023-08-22 | 胡小英; 李昊; 刘爽; 景心怡; 孙雪平; 刘卫国; 王炜 |
| 本发明涉及一种调节光学成像系统相干性的方法，所用装置具体分为照明光学系统和成像系统两部分，照明光学系统包括非相干扩展光源、会聚透镜和物体；成像系统包括成像透镜以及CMOS相机。本发明提供的方法中，照明光学系统数值孔径和成像系统数值孔径的比值决定系统相干性的大小，可通过改变从物方观察的照明光学系统数值孔径和成像系统数值孔径的比值调控系统相干性的大小。本发明调节光学成像系统相干性的方法简单、易操作，且系统确定后，相干性不易发生变化。 | ||||||
| 19 | 应用矩阵积分法优化光刻部分相干模型的方法 | CN202310749886.9 | 2023-06-21 | CN116893567A | 2023-10-17 | 柯顺魁 |
| 本申请提供一种应用矩阵积分法优化光刻部分相干模型的方法，包括：步骤S1，部分相干光光刻成像理论模型的构建；步骤S2，部分相干光光刻成像模型的实现；步骤S3，积分法转换优化光刻部分相干成像算法。用矩阵积分法将计算光刻部分相干成像需要的四层循环转换成两层循环；或者，用矩阵积分法将等效光源的两层循环变成矩阵运算，然后将非相干叠加的两层循环采用并行算法，既缩短了光照修正的周期，也节省了光罩出版的交货期。 | ||||||
| 20 | 一种基于相干结构的远场成像方法及系统 | CN202111043044.9 | 2021-09-07 | CN113916792B | 2024-04-05 | 刘永雷; 陈亚红; 王飞; 蔡阳健 |
| 本公开提供了一种基于相干结构的远场成像方法及系统，所述方案利用部分相干光束的相干结构和交叉相位结构的联合调控实现相干结构作为图像信息的传输载体，对加载信息后的相干结构进行调控；当传输路径有障碍物遮挡时，经远场传输后，在远场通过探测障碍物的形状大小实时调控部分相干光束相干性的大小，在远场利用被障碍物破坏后的信息来恢复出完整的相干结构信息，进而利用相干结构信息和图像信息的对应关系实现远场成像。所述方案能够探测出远场传输路径是否有障碍物，包括障碍物的形状大小和位置。根据障碍物大小，实时调控光源相干性大小，确保相干结构不被破坏，进而实现远场成像。 | ||||||
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