Carbon nanotube-graphene hybrid transparent conductor and field effect transistor |
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| 申请号 | US14820011 | 申请日 | 2015-08-06 | 公开(公告)号 | US09954175B2 | 公开(公告)日 | 2018-04-24 |
| 申请人 | International Business Machines Corporation; Egypt Nanotechnology Center; | 发明人 | Ageeth A. Bol; Bhupesh Chandra; Amal Kasry; Ahmed Maarouf; Glenn J. Martyna; George S. Tulevski; | ||||
| 摘要 | A nanotube-graphene hybrid nano-component and method for forming a cleaned nanotube-graphene hybrid nano-component. The nanotube-graphene hybrid nano-component includes a gate; a gate dielectric formed on the gate; a channel comprising a carbon nanotube-graphene hybrid nano-component formed on the gate dielectric; a source formed over a first region of the carbon nanotube-graphene hybrid nano-component; and a drain formed over a second region of the carbon nanotube-graphene hybrid nano-component to form a field effect transistor. | ||||||
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