Methods for forming a carbon nanotube-graphene hybrid film on a substrate

申请号 US14820028 申请日 2015-08-06 公开(公告)号 US09887361B2 公开(公告)日 2018-02-06
申请人 International Business Machines Corporation; Egypt Nanotechnology Center; 发明人 Ageeth A. Bol; Bhupesh Chandra; Amal Kasry; Ahmed Maarouf; Glenn J. Martyna; George S. Tulevski;
摘要 A nanotube-graphene hybrid film and method for forming a cleaned nanotube-graphene hybrid film. A method includes depositing nanotube film over a metal foil to produce a layer of nanotube film, placing the metal foil with as-deposited nanotube film in a chemical vapor deposition furnace to grow graphene on the nanotube film to form a nanotube-graphene hybrid film, and transferring the nanotube-graphene hybrid film over a substrate.
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