Planar sample conveyor device |
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| 申请号 | JP4204784 | 申请日 | 1984-03-07 | 公开(公告)号 | JPS60188232A | 公开(公告)日 | 1985-09-25 |
| 申请人 | Hitachi Ltd; | 发明人 | KAWAHARA HIRONORI; | ||||
| 摘要 | PURPOSE:To make a conveying space narrower to miniaturize a conveyor device which conveys planar-like smaples from a rack to a process chamber, and then conveys them from the process chamber to another rack, by providing a rotary arm having its rotary end formed with a projection. CONSTITUTION:Upon conveyance of print circuit boards from a rack 4 to a process chamber 1, a motor 6 rotates a rotary arm 5 to push each print circuit board with the use of a projection 16 formed on the rotary arm so that the print circuit boards 3 are conveyed along a guide rail 15 in the process chamber 1 and therefore is delivered to a predetermined position on a conveyor 2. Then the rotary arm 5 is rotated in the reverse direction to be returned to its original position, and as well the rack 4 is lowered by means of a motor 7 to ready to introduce the next print circuit board 3. Meanwhile, on the discharge side of the process chamber 1, a processed print circuit board 3 which is fed out by means of a conveyor 2 is shifted onto a guide rail 13 by means of feed rollers 8. Then a rotary arm 9 is rotated by means of a motor 10 to push the print circuit board 3 with the use of a projection 17 on the rotary arm 9 so that the print circuit board is shifted onto another rack 11. | ||||||
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