FLOATING CONVEYOR AND SUBSTRATE PROCESSING APPARATUS |
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| 申请号 | US15856665 | 申请日 | 2017-12-28 | 公开(公告)号 | US20180178993A1 | 公开(公告)日 | 2018-06-28 |
| 申请人 | SHIBAURA MECHATRONICS CORPORATION; | 发明人 | Yuichi IMAOKA; Akinori ISO; | ||||
| 摘要 | According to one embodiment, a floating conveyor is configured to convey a substrate while floating the substrate. The floating conveyor includes a lower floating section and an upper floating section with a conveying path of the substrate therebetween. A plurality of floating blocks that constitute at least one of the lower floating section and the upper floating section are arranged to be separated by a space, and a floating block that constitutes the other is arranged to face the space. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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