Precision positioning table |
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| 申请号 | JP22425282 | 申请日 | 1982-12-20 | 公开(公告)号 | JPS59115140A | 公开(公告)日 | 1984-07-03 |
| 申请人 | Matsushita Electric Ind Co Ltd; | 发明人 | TSURUHA MASAYUKI; | ||||
| 摘要 | PURPOSE:To provide possibility of setting the positioning accuracy with free selectivity by transmitting the displacement in the perpendicular direction through the contact by a slope, thereby making possible an ultra-precision positioning as well as micro-feeding, and also by setting the ratio of gradients to any appropriate value. CONSTITUTION:A traveling table 10 is supported slidably by a body 9 with a straight motion bearing 11 interposed. A slope 12 is provided at a portion of this traveling table 10, and another slope 14 in contact with the slope 12 mentioned first is furnished at a sliding block 13. With this sliding block 13, a screw shaft 15 is connected by means of screw engagement and borne by bearings 16, 17 rotatably. The screw shaft 15 to be rotated by a pulse motor 18 for a certain specific angle moves the above-mentioned block 13 for a certain specific distance with the aid of said screw engagement. Then the table 10 travels in the perpendicular direction to the moving direction of block 13 in a reduced scale according to the ratio of gradients. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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