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Capacitor circuit, circuit device, physical quantity detecting device, electronic apparatus, and moving object

申请号 US15862992 申请日 2018-01-05 公开(公告)号 US10008333B2 公开(公告)日 2018-06-26
申请人 Seiko Epson Corporation; 发明人 Atsushi Tanaka; Hideo Haneda;
摘要 A capacitor circuit includes: a capacitor array including a plurality of capacitors; a switch array including a plurality of switch circuits, the switch circuits being respectively connected to the capacitors of the capacitor array; a plurality of switch control signal lines supplied with a plurality of switch control signals; and a substrate having a major surface on which the switch circuits are formed. At least part of the capacitors of the capacitor array is formed of a first conductive layer. The switch control signal lines are formed of a second conductive layer provided between the major surface and the first conductive layer. The capacitor array and the switch array are disposed so as to overlap each other at least in part in a plan view when viewed in a normal direction of the major surface.
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