ALIGNMENT METHOD, IMPRINT METHOD, ALIGNMENT APPARATUS, AND POSITION MEASUREMENT METHOD |
|||||||
| 申请号 | PCT/JP2007058898 | 申请日 | 2007-04-18 | 公开(公告)号 | WO2007123249A3 | 公开(公告)日 | 2008-05-22 |
| 申请人 | CANON KK; SUEHIRA NOBUHITO; SEKI JUNICHI; INA HIDEKI; SENTOKU KOICHI; | 发明人 | SUEHIRA NOBUHITO; SEKI JUNICHI; INA HIDEKI; SENTOKU KOICHI; | ||||
| 摘要 | In an alignment method for effecting alignment between two plate-like objects, a first plate-like object provided with a first alignment mark and a second plate-like object provide with a second alignment mark are disposed opposite to each other. A first area and a second area are provided at mutually nonoverlapping positions in an image pickup area for being observed through an image pickup > device. Images of the first and second alignment marks are picked up by the image pickup device from a direction substantially perpendicular to an in-plane direction of the first and second plate-like objects. Alignment control is effected by using first information about a deviation of the first alignment mark from a predetermined position in the first area and second information about a deviation of the second alignment mark from a predetermined position in the second area. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
QQ群二维码
意见反馈
意见反馈