NON-MECHANICAL FABRICATION OF CARBON-CONTAINING WORK PIECES专利检索- 图纹面例如印刷表面的照相制版如光刻工艺;图纹面照相制版用的材料如:含光致抗蚀剂的材料;图纹面照相制版的专用设备专利检索查询-专利查询网

NON-MECHANICAL FABRICATION OF CARBON-CONTAINING WORK PIECES
申请号	PCT/US0222504	申请日	2002-05-17	公开(公告)号	WO03021354A3	公开(公告)日	2003-08-28
申请人	HONEYWELL INT INC;			发明人	GOLECKI ILAN;
摘要	Complex features and fine details are created in a carbon containing work piece by photolithography. A mask layer is deposited by evaporation onto the work piece. A desired pattern is created on the mask layer. The pattern is etched into the work piece and the remaining portion of the mask layer is dissolved.
权利要求
说明书全文