序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
21 Atomic sensor physics package having optically transparent panes and external wedges US13947633 2013-07-22 US09410885B2 2016-08-09 Christina Marie Schober; James A. Vescera; Jennifer S. Strabley
One embodiment is directed towards a physics package of an atomic sensor. The physics package includes a plurality of panes of optically transparent material enclosing a vacuum chamber and one or more wedges attached to an external surface of one or more of the panes. The physics package also includes at least one of a light source, photodetector, or mirror attached to the one or more wedges, the light source configured to generate an input light beam for the vacuum chamber, the photodetector configured to detect an output light beam from the vacuum chamber, and the mirror configured to reflect a light beam from the vacuum chamber back into the vacuum chamber, wherein the wedge is configured to oriented such a light source, photodetector, or mirror such that a respective light beam corresponding thereto transmits through a corresponding pane at an acute angle with respect to the corresponding pane.
22 ATOMIC SENSOR PHYSICS PACKAGE HAVING OPTICALLY TRANSPARENT PANES AND EXTERNAL WEDGES US13947633 2013-07-22 US20150022816A1 2015-01-22 Christina Marie Schober; James A. Vescera; Jennifer S. Strabley
One embodiment is directed towards a physics package of an atomic sensor. The physics package includes a plurality of panes of optically transparent material enclosing a vacuum chamber and one or more wedges attached to an external surface of one or more of the panes. The physics package also includes at least one of a light source, photodetector, or mirror attached to the one or more wedges, the light source configured to generate an input light beam for the vacuum chamber, the photodetector configured to detect an output light beam from the vacuum chamber, and the mirror configured to reflect a light beam from the vacuum chamber back into the vacuum chamber, wherein the wedge is configured to oriented such a light source, photodetector, or mirror such that a respective light beam corresponding thereto transmits through a corresponding pane at an acute angle with respect to the corresponding pane.
23 VACUUM CHAMBER US12126408 2008-05-23 US20090291035A1 2009-11-26 Michael Colin Begg; James Cumming Ramage
A vacuum chamber 2 has walls having an inner layer 20 of a gas impermeable electrically non-conductive material and an outer layer 22 of a different electrically non-conducting material. The inner layer 20 is a polymeric film layer of Kapton® polyimide. The outer layer 22 is a composite material which includes reinforcing carbon or glass fibers bound in a matrix of epoxy resin. The vacuum chamber has end flanges for attaching it to adjacent parts of a vacuum system. The vacuum chamber is made by placing a sheet of Kapton® material around a mould and sealing its ends together. The composite material is then wound onto the inner layer in its wet form to provide the outer layer. The outer layer material is then cured to dry the epoxy resin, binding the layer to the inner layer, and the multi-layer structure removed from the mould. The vacuum chamber is particularly suitable for use in an ion implantation system in the presence of a time varying magnetic field.
24 Plasma valve US09685227 2000-10-11 US06528948B1 2003-03-04 Ady Hershcovitch; Sushil Sharma; John Noonan; Elbio Rotela; Ali Khounsary
A plasma valve includes a confinement channel and primary anode and cathode disposed therein. An ignition cathode is disposed adjacent the primary cathode. Power supplies are joined to the cathodes and anode for rapidly igniting and maintaining a plasma in the channel for preventing leakage of atmospheric pressure through the channel.
25 Particle accelerators US3471630D 1968-01-23 US3471630A 1969-10-07 GIBBONS WILLIAM FREDERICK; WATKIN KENNETH
26 Transportable linear accelerator system and transportable neutron source equipped therewith US15324870 2014-09-03 US10098218B2 2018-10-09 Kazuo Yamamoto; Sadahiro Kawasaki; Hiromitsu Inoue
For the purpose of providing a transportable linear accelerator system which can restrain entering of losing ion beams deviated from a trajectory therefor, to thereby efficiently achieve reduction in radioactivity at low cost, and a transportable neutron source equipped therewith, a transportable linear accelerator system is configured to be provided with a beam chopper just before an inlet of a post-accelerator, thereby to cut off, from the proton beams pre-accelerated by a pre-accelerator, uncontrolled proton beams, and thus to radiate only the controlled proton beams to the post-accelerator, so that the proton beams are prevented from hitting an acceleration electrode, etc. of the post accelerator.
27 MAGNETIC FIELD COMPENSATION IN A LINEAR ACCELERATOR US15450666 2017-03-06 US20170265290A1 2017-09-14 SHMARYU M. SHVARTSMAN; James F. Dempsey
A system has a linear accelerator, ion pump and a compensating magnet. The ion pump includes an ion pump magnet position, an ion pump magnet shape, an ion pump magnet orientation, and an ion pump magnet magnetic field profile. The compensating magnet has a position, a shape, an orientation, and a magnetic field profile, where at least one of the position, shape, orientation, and magnetic field profile of the compensating magnet reduce at least one component of a magnetic field in the linear accelerator resulting from the ion pump magnet.
28 Beam guiding apparatus US15067691 2016-03-11 US09596743B2 2017-03-14 Andreas Enzmann
A beam guiding apparatus includes a vacuum chamber that includes a target region arranged to receive a target material for generating EUV radiation. The vacuum chamber includes a first and second opening for receiving into the vacuum chamber a first and second laser beam, respectively. The first and second laser beam have different wavelengths. The beam guiding apparatus further includes a superposition apparatus arranged to superpose the first and second laser beams entering into the vacuum chamber through the first and second openings, respectively, for common beam guidance in the direction of the target region. The superposition apparatus comprises a first optical element configured to seal the first opening of the vacuum chamber in a gas-tight manner and transmit the first laser beam, or a second optical element configured to seal off the second opening of the vacuum chamber in a gas-tight manner and transmit the second laser beam.
29 CYCLIC ACCELERATOR FOR ACCELERATING CHARGE CARRIERS AND METHOD FOR MANUFACTURING A CYCLIC ACCELERATOR US15000777 2016-01-19 US20160212834A1 2016-07-21 Karl HABERGER
What is shown is a cyclic accelerator for accelerating charge carriers. The cyclic accelerator includes a charge carrier source configured to generate free charge carriers, a vacuum chamber configured to receive the free charge carriers, wherein the vacuum chamber is produced by means of MEMS technology, and wherein at least a main surface region of the vacuum chamber has a semiconductor material. In addition, the cyclic accelerator has electrodes configured to accelerate the free charge carriers in the vacuum chamber by means of an alternating current field, and a magnetic field generator configured to generate a magnetic field perpendicularly to the direction of movement of the charge carriers.
30 Isotope production system and cyclotron having a magnet yoke with a pump acceptance cavity US12435949 2009-05-05 US08106370B2 2012-01-31 Jonas Norling; Tomas Eriksson
A cyclotron that includes a magnet assembly to produce a magnetic field to direct charged particles along a desired path. The cyclotron also includes a magnet yoke that has a yoke body that surrounds an acceleration chamber. The magnet assembly is located in the yoke body. The yoke body forms a pump acceptance (PA) cavity that is fluidicly coupled to the acceleration chamber. The cyclotron also includes a vacuum pump that is configured to introduce a vacuum into the acceleration chamber. The vacuum pump is positioned in the PA cavity.
31 Pumping device by non-vaporisable getter and method for using this getter US09202668 1998-12-18 US06468043B1 2002-10-22 Cristoforo Benvenuti
The invention discloses a pumping device by non-vaporizable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterized in that it comprises a thin layer of non-vaporizable getter coated on at least almost the whole metal wall surface defining the chamber.
32 Method of manufacturing a ceramics-type vacuum vessel US457013 1995-06-01 US5603788A 1997-02-18 Tetsuya Abe; Yoshio Murakami; Hisao Takeuchi; Akira Yamakawa; Masaya Miyake
A vacuum vessel is provided in which the majority of a vessel wall including an annular wall portion (1) and a plate-wall portion (2) is formed of ceramic material such as silicon nitride, for example. To bond the plural wall members together, bonding faces having a surface flatness of not more than 1 .mu.m are prepared thereon, and then a ceramic powder bonding substance with an average particle diameter of not more than 1 .mu.m is interposed between adjacent bonding faces and subjected to heating. Because the generation of gas, such as hydrogen, from the wall of the ceramic vessel is reduced, extremely high vacuum can be generated and maintained in the interior of the vacuum vessel. Also, because the wall of the vacuum vessel has a high permeability with respect to a magnetic field and an electric field, the vacuum vessel can be used as a vessel in a particle accelerator that allows the high precision control of charged particles therein by means of an electromagnetic field.
33 Accelerator vacuum pipe having a layer of a getter material disposed on an inner surface of the pipe US605760 1990-10-30 US5101167A 1992-03-31 Kazunori Ikegami
An accelerator vacuum pipe for a charged-particle acceleration and storage system having a vacuum zone defined therein is provided with a layer of getter material which can capture residual or generated gas molecules in the pipe-member. The layer of getter material is disposed over the entire inner wall of the vacuum pipe in at least a deflection zone where the charged-particles are deflected.
34 Vacuum chamber for an SOR apparatus US307162 1989-02-06 US4908580A 1990-03-13 Tadatoshi Yamada; Masatami Iwamoto; Akinori Ohara; Shirou Nakamura; Yuuichi Yamamoto
A vacuum chamber for a superconducting SOR apparatus comprises a main chamber through which a beam of charged particles can pass and an SOR chamber which opens onto the inside of the main chamber. The main chamber has a connecting flange formed on each end, and the SOR chamber has a connecting flange formed on its outer end. The dimensions of the vacuum chamber are such that the entire vacuum chamber can fit into the gap between the vacuum tanks of a superconducting bending magnet for the SOR apparatus. The vacuum chamber may further comprise an SOR port in the form of a tube having a flange which connects to the flange of the SOR chamber. The cross-sectional dimensions of the SOR port increase from the inner end which is connected to the SOR chamber to the outer end.
35 Vacuum chamber for containing particle beams US801881 1985-11-26 US4712074A 1987-12-08 Alexander Harvey
A vacuum chamber for containing a charged particle beam in a rapidly changing magnetic environment comprises a ceramic pipe with conducting strips oriented along the longitudinal axis of the pipe and with circumferential conducting bands oriented perpendicular to the longitudinal axis but joined with a single longitudinal electrical connection. When both strips and bands are on the outside of the ceramic pipe, insulated from each other, a high-resistance conductive layer, such as nickel can be coated on the inside of the pipe.
36 Positioning device for a radiation shield having means for cooling said shield US41482164 1964-11-30 US3395279A 1968-07-30 MOORE VERNON L
37 Atomic sensor physics package having optically transparent panes and external wedges EP14167394.7 2014-05-07 EP2829925B1 2018-07-18 Schober, Christina Marie; Vescera, James A.; Strabley, Jennifer S.
One embodiment is directed towards a physics package of an atomic sensor. The physics package includes a plurality of panes of optically transparent material enclosing a vacuum chamber and one or more wedges attached to an external surface of one or more of the panes. The physics package also includes at least one of a light source, photodetector, or mirror attached to the one or more wedges, the light source configured to generate an input light beam for the vacuum chamber, the photodetector configured to detect an output light beam from the vacuum chamber, and the mirror configured to reflect a light beam from the vacuum chamber back into the vacuum chamber, wherein the wedge is configured to orient such a light source, photodetector, or mirror such that a respective light beam corresponding thereto transmits through a corresponding pane at an acute angle with respect to the corresponding pane.
38 STRAHLFÜHRUNGSEINRICHTUNG UND EUV-STRAHLUNGSERZEUGUNGSVORRICHTUNG MIT EINER ÜBERLAGERUNGSEINRICHTUNG EP13763217.0 2013-09-12 EP3045022A1 2016-07-20 ENZMANN, Andreas
The invention relates to a beam guiding apparatus (6), comprising: a vacuum chamber (12), in which a target material (8) is introducible into a target region (7) for generating EUV radiation, wherein the vacuum chamber (12) includes a first opening (13) for the entrance of a first laser beam (3) and a second opening (14) for the entrance of a second laser beam (5), wherein the first laser beam (3) and the second laser beam (5) have different wavelengths (λ 1, λ 2), and a superposition apparatus (18) for superposing the two laser beams (3, 5) entering into the vacuum chamber (12) through the first and the second openings (13, 14) for a common beam guidance in the direction of the target region (7). An optical element (22) closing off the first opening (13) of the vacuum chamber (12) in a gas-tight manner and transmitting the first laser beam (3) or an optical element (19) closing off the second opening (14) of the vacuum chamber (12) in a gas-tight manner and transmitting the second laser beam (5) is preferably embodied as superposition apparatus (18). The invention also relates to an EUV beam generating device (1) comprising such a beam guiding apparatus (6).
39 PROCEDE DE MISE EN OEUVRE D'UN GETTER NON EVAPORABLE EP97929213.3 1997-06-18 EP0906635B1 2003-03-05 BENVENUTI, Cristoforo
The invention discloses a pumping device by non-vaporisable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterised in that it comprises a thin layer of non-vaporisable getter coated on at least almost the whole metal wall surface defining the chamber.
40 Accelerator vacuum pipe EP90308916.7 1990-08-14 EP0426277A2 1991-05-08 Kazunori, Ikegami, c/o Mitsubishi Denki K.K.

An accelerator vacuum pipe for a charged-particle acceleration and storage system having a vacuum zone defined therein is provided with a layer of getter material which can capture residual or generated gas molecules-in the pipe-member. The layer of getter material is disposed over the entire inner wall of the vacuum pipe in at least a deflection zone where the charged-particles are deflected.

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