141 |
Optically controlled MEMS devices |
US11028495 |
2004-12-30 |
US07388186B2 |
2008-06-17 |
Richard P. Berg; Tsung-Yuan Hsu |
An optically controlled mechanical device actuated by electrostatic forces. The device includes electrostatic plates disposed on opposing portions of the device to accumulate charge; conductors to conduct charge to the electrostatic plates from a bias supply; and a photoelectric element having a photoresistive element arranged to affect a quantity of charge reaching the electrostatic plates from the bias supply. The device is caused to actuate to one position when the photoresistive element is exposed to a first level of illumination, and to a another position when the photoresistive element is exposed to a different second level of illumination. |
142 |
Method and apparatus for protection of contour sensing devices |
US11090315 |
2005-03-25 |
US07316167B2 |
2008-01-08 |
Keith T DeConde; Joram Diamant; Srinivasan K. Ganapathi; Joseph J. Pritikin |
A sheet film protective covering for different types of contour sensing devices is described. In a preferred embodiment, this covering is a mylar sheet film that is coated with a layer of a conductive material. The bottom surface of the mylar film is also preferably coated with a layer of an adhesive. The sheet film covering preferably is contiguous and serves the purpose, among other things, to protect the underlying surface of the pressure-sensing device from contaminants and from electrostatic discharge, as well provide force concentration during use. |
143 |
Integrated Circuit With Analog Connection Matrix |
US11578722 |
2005-04-14 |
US20070272529A1 |
2007-11-29 |
Josep Montanya Silvestre |
Integrated circuit with analog connection matrix. The integrated circuit includes an analog connection matrix having a plurality of analog i/o contacts. The analog i/o contacts have a plurality of electric interconnections with respect to one another through miniaturized relays, in which each miniaturized relay includes a conductive element arranged in said intermediate space, said conductive element being suitable for effecting a movement between a first position and a second position depending on a control electromagnetic signal and said conductive element opening or closing an electric circuit depending on whether it is in said first position or in said second position. |
144 |
Latching micro-magnetic switch array |
US11179809 |
2005-07-13 |
US20060146470A1 |
2006-07-06 |
Jun Shen; Cheng Wei |
Systems and methods for actuating micro-magnetic latching switches in an array of micro-magnetic latching switches are described. The array of switches is defined by Y rows aligned with a first axis and X columns aligned with a second axis. Each switch in the array of switches is capable of being actuated by a coil. In an aspect, a row of coils is moved along the second axis to be positioned adjacent to a selected one of the Y rows of switches. A sufficient driving current is proved to a selected coil in the row of coils to actuate a selected switch in the selected one of the Y rows of switches. In another aspect, a plurality of first axis drive signals and a plurality of second axis drive signals are generated. These signals drive an array of coils, wherein each coil in the array of coils is positioned adjacent to a corresponding switch in the array of switches. Each first axis drive signal is coupled to coils in a corresponding column of coils in the array of coils. Each second axis drive signal is coupled to coils in a corresponding row of coils in the array of coils. In another aspect, a three-dimensional array of switches is actuated by drive signals that drive a three-dimensional array of coils. |
145 |
Electronically latching micro-magnetic switches and method of operating same |
US09799746 |
2001-03-06 |
US07071431B2 |
2006-07-04 |
Meichun Ruan; Jun Shen; Charles Wheeler |
A switch with an open state and a closed state suitably includes a cantilever having first and second states corresponding to the open and closed states of the switch, respectively. The switch may also include a magnet configured to provide an electromagnetic field that maintains said cantilever in one of the first and second states. Various embodiments may also include an electrode or electrical conductor configured to provide an electric potential or electromagnetic pulse, as appropriate, to switch the cantilever between the first and second states. Various embodiments may be formulated with micromachining technologies, and may be formed on a substrate. |
146 |
Optical MEMS switching array with embedded beam-confining channels and method of operating same |
US09902883 |
2001-07-11 |
US07027682B2 |
2006-04-11 |
Meichun Ruan; Jun Shen; Charles Wheeler |
A new optical switch device and method of operating such a device overcomes alignment problems through the use of an optical signal-confining channel that may be embedded so as to confine optical signals in a desired propagation path such that the optical signal's alignment with the output is secured. Small-angle mirrors may be used so as to direct the optical signal into the intended optical signal-confining channels so as to achieve the desired optical switching. The mirrors could be latching micro-mirrors or non-latching micro-mirrors. Such mirrors could be controlled by electrostatic actuation, thermal actuation or electromagnetic actuation, or any other technique. |
147 |
Fingerprint sensors using membrane switch arrays |
US11120525 |
2005-05-02 |
US20050229380A1 |
2005-10-20 |
Keith Deconde; Srinivasan Ganapathi; Randolph Gluck; Steve Hovey; Shiva Prakash; Christian Stoessel |
A method of making an integrated texture sensor for sensing a texture is described. In one embodiment, the method is directed to a sensor that that is protected from external contaminating particulates and will self-equalize using air from outside the sensor. Further combinations of such protection among various membrane switches, in combination with various types of membranes, is described. In another embodiment, a method of making a skin-texture sensor for sensing a skin texture having a plurality of ridges and a plurality of valleys is described, such that when completed, applying a ridge of the texture to a membrane switch will cause flexure of the membrane resulting in a contact between the lower electrode and the upper electrode, the contact establishing an electrical communication between said one of the row lines and said one of the column lines, whereas disposing a valley of the texture over said each membrane switch will not result in the contact between the lower electrode and the upper electrode. |
148 |
Relay and cross-connect |
US10509842 |
2002-04-02 |
US20050195057A1 |
2005-09-08 |
Tore Andre |
The present invention relates to a fuse-relay including a first pole (1, 11, 21, 31, 81) and a second pole (2, 12, 22, 32, 82). According to the invention the fuse-relay includes a resilient device (5, 18, 27, 37, 87) that is held in an elastically deformed position by a fuse (6, 16, 26, 36, 86) when the fuse (6, 16, 26, 36, 86) is whole; and in that the resilient device (5, 18, 27, 37, 87) is arranged to make or break a connection between the first pole (1, 11, 21, 31, 81) and the second pole (2, 12, 22, 32, 82) when the fuse (6, 16, 26, 36, 86) is blown. The invention also relates to a cross-connect with such fuse-relays, to a telecommunication system with such cross-connects and to a connection method. |
149 |
Optically controlled MEMS devices |
US11028495 |
2004-12-30 |
US20050173619A1 |
2005-08-11 |
Richard Berg; Tsung-Yuan Hsu |
An optically controlled mechanical device actuated by electrostatic forces. The device includes electrostatic plates disposed on opposing portions of the device to accumulate charge; conductors to conduct charge to the electrostatic plates from a bias supply; and a photoelectric element having a photoresistive element arranged to affect a quantity of charge reaching the electrostatic plates from the bias supply. The device is caused to actuate to one position when the photoresistive element is exposed to a first level of illumination, and to a another position when the photoresistive element is exposed to a different second level of illumination |
150 |
Insertion-type liquid metal latching relay array |
US10412880 |
2003-04-14 |
US06879088B2 |
2005-04-12 |
Marvin Glenn Wong; Arthur Fong |
An electrical relay array using conducting liquid in the switching mechanism. The relay array is amenable to manufacture by micro-machining techniques. Each element of the relay array uses an actuator, such as a piezoelectric element, to cause a switch actuator to insert into a cavity in a static switch contact structure. The cavity has sides and a pad on its end that are wettable by the conducting liquid. The cavity is filled with the conducting liquid, which may be liquid metal. Insertion of the switch actuator into the cavity causes the conducting liquid to be displaced outward and come in contact with the contact pad on the switch actuator. The volume of conducting liquid is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator. When the switch actuator retracts away from the static switch contact structure, the available volume for conducting liquid inside the fixed switch contact structure increases and the combination of the movement of the conducting liquid into the cavity and the contact pad on the switch actuator moving away from the bulk of the conducting liquid causes the conducting liquid connection between the fixed and moving contact pads to be broken. When the switch actuator returns to its rest position, the contact remains electrically open because there is not enough conducting liquid to bridge the gap without being disturbed. The high frequency capability is provided by the additional conductors in the assembly, which act to make the switch a coaxial structure. |
151 |
Wide band cross point switch using MEMS technology |
US10143180 |
2002-05-09 |
US06849924B2 |
2005-02-01 |
Robert C. Allison; Jar J. Lee |
A multilayer switching assembly for switching high frequency signals has MEMS structures on a ceramic substrate having a top surface, a bottom surface and a plurality of insulating layers. The insulating layers are separated by a first conductor and a second conductor. The first conductor is connected to a ground potential. The second conductor is separated from the first conductor by one of the insulating layers. The second conductor presents a specific impedance (50 ohms) with respect to the first conductor to high frequency signals traveling on the second conductor.64 MEMS structures are mounted on the top surface. Each MEMS has an input, an output, and a control. The input connected to the second conductor. The output is connected to a coplanar waveguide placed on the top surface. The control is connected to the bottom surface.The input to each MEMS is electrically shielded from the output and from the control by a third conductor connected to the first (grounded) conductor. The third conductor traverses one or more of the insulating layers thereby acting as a shield and precluding the high frequency signals presented to the input from propagating to the output and to the control. The 64 MEMS are arranged in a square 8 by 8 matrix, as well as their controls. High frequency inputs and outputs to be switched by the MEMS are placed on the periphery of the substrate to further enhance the separation of signals. Terminating resistors (50 ohms) are also placed near the periphery. |
152 |
Method and apparatus for pressure sensing |
US10146417 |
2002-05-14 |
US06829950B2 |
2004-12-14 |
Srinavasan K. Ganapathi; Randolph S. Gluck; Steven H. Hovey; Shiva Prakash |
The present invention provides a pressure based fingerprint image capture device that includes an array of cantilevers or simply suspended bridges, with each pressure based sensor having a cantilever or a simply suspended bridge in contact with a conducting electrode that deforms under the load applied by the localized ridge on the fingerprint, and which provides contact to another conducting electrode thereby closing the electrical circuit, a switch in the simplest form, and providing a “pulse” response from the sensor. In the quiescent state, each cantilever or simply suspended bridge structure contains an upper electrode which forms one part of the switch, while another conducting layer, the lower electrode at the bottom of the well of the individual sensor, forms the other part of the switch. |
153 |
Insertion-type liquid metal latching relay array |
US10412880 |
2003-04-14 |
US20040201309A1 |
2004-10-14 |
Marvin
Glenn
Wong; Arthur
Fong |
An electrical relay array using conducting liquid in the switching mechanism. The relay array is amenable to manufacture by micro-machining techniques. Each element of the relay array uses an actuator, such as a piezoelectric element, to cause a switch actuator to insert into a cavity in a static switch contact structure. The cavity has sides and a pad on its end that are wettable by the conducting liquid. The cavity is filled with the conducting liquid, which may be liquid metal. Insertion of the switch actuator into the cavity causes the conducting liquid to be displaced outward and come in contact with the contact pad on the switch actuator. The volume of conducting liquid is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator. When the switch actuator retracts away from the static switch contact structure, the available volume for conducting liquid inside the fixed switch contact structure increases and the combination of the movement of the conducting liquid into the cavity and the contact pad on the switch actuator moving away from the bulk of the conducting liquid causes the conducting liquid connection between the fixed and moving contact pads to be broken. When the switch actuator returns to its rest position, the contact remains electrically open because there is not enough conducting liquid to bridge the gap without being disturbed. The high frequency capability is provided by the additional conductors in the assembly, which act to make the switch a coaxial structure. |
154 |
ELECTRONICALLY LATCHING MICRO-MAGNETIC SWITCHES AND METHOD OF OPERATING SAME |
US09799746 |
2001-03-06 |
US20040013346A1 |
2004-01-22 |
Meichun
Ruan; Jun
Shen; Charles
Wheeler |
A switch with an open state and a closed state suitably includes a cantilever having first and second states corresponding to the open and closed states of the switch, respectively. The switch may also include a magnet configured to provide an electromagnetic field that maintains said cantilever in one of the first and second states. Various embodiments may also include an electrode or electrical conductor configured to provide an electric potential or electromagnetic pulse, as appropriate, to switch the cantilever between the first and second states. Various embodiments may be formulated with micromachining technologies, and may be formed on a substrate. |
155 |
Wide band cross point switch using MEMS technology |
US10143180 |
2002-05-09 |
US20030210579A1 |
2003-11-13 |
Robert
C.
Allison; Jar
J.
Lee |
A multilayer switching assembly for switching high frequency signals has MEMS structures on a ceramic substrate having a top surface, a bottom surface and a plurality of insulating layers. The insulating layers are separated by a first conductor and a second conductor. The first conductor is connected to a ground potential. The second conductor is separated from the first conductor by one of the insulating layers. The second conductor presents a specific impedance (50 ohms) with respect to the first conductor to high frequency signals traveling on the second conductor. 64 MEMS structures are mounted on the top surface. Each MEMS has an input, an output, and a control. The input connected to the second conductor. The output is connected to a coplanar waveguide placed on the top surface. The control is connected to the bottom surface. The input to each MEMS is electrically shielded from the output and from the control by a third conductor connected to the first (grounded) conductor. The third conductor traverses one or more of the insulating layers thereby acting as a shield and precluding the high frequency signals presented to the input from propagating to the output and to the control. The 64 MEMS are arranged in a square 8 by 8 matrix, as well as their controls. High frequency inputs and outputs to be switched by the MEMS are placed on the periphery of the substrate to further enhance the separation of signals. Terminating resistors (50 ohms) are also placed near the periphery. |
156 |
Electronically latching micro-magnetic switches and method of operating same |
US09799831 |
2001-03-06 |
US06633212B1 |
2003-10-14 |
Meichun Ruan; Jun Shen; Charles Wheeler |
A switch with an open state and a closed state suitably includes a cantilever having first and second state corresponding to the open and closed states of the switch, respectively. The switch may also include a magnet configured to provide an electromagnetic field that maintains said cantilever in one of the first and second states. Various embodiments may also include an electrode or electrical conductor configured to provide an electric potential or electromagnetic pulse, as appropriate, to switch the cantilever between the first and second states. Various embodiments may be formulated with micromachining technologies, and may be formed on a substrate. |
157 |
Bi-stable microswitch including shape memory alloy latch |
US09885168 |
2001-06-21 |
US06603386B2 |
2003-08-05 |
Dinesh Kumar Sood; Ronald Barry Zmood |
A bi-stable microswitch (1) including a pair of contacts (6, 7) and an armature (4) movable between a first position and a second position to selectively make or break the pair of contacts, the armature being latched in the second position by a shape memory alloy latch (14), wherein the shape memory alloy latch is caused to deform upon heating so as to permit the armature to return to the first position. |
158 |
Electronically switching latching micro-magnetic relay and method of operating same |
US10158192 |
2002-05-31 |
US20020196112A1 |
2002-12-26 |
Meichun
Ruan; Jun
Shen |
According to various embodiments of the invention, a relay is suitably formed to exhibit an open state and a closed state. The relay is operated by providing a cantilever sensitive to magnetic fields such that the cantilever exhibits a first state corresponding to the open state of the relay and a second state corresponding to the closed state of the relay. A first magnetic field may be provided to induce a magnetic torque in the cantilever, and the cantilever may be switched between the first state and the second state with a second magnetic field that may be generated by, for example, a conductor formed on a substrate with the relay. |
159 |
Electronically latching micro-magnetic switches and method of operating same |
US09563595 |
2000-05-03 |
US06496612B1 |
2002-12-17 |
Meichun Ruan; Jun Shen; Charles Wheeler |
A switch with an open state and a closed state suitably includes a cantilever having first and second states corresponding to the open and closed states of the switch, respectively. The switch may also include a magnet configured to provide an electromagnetic field that maintains said cantilever in one of the first and second states. Various embodiments may also include an electrode or electrical conductor configured to provide an electric potential or electromagnetic pulse, as appropriate, to switch the cantilever between the first and second states. Various embodiments may be formulated with micromachining technologies, and may be formed on a substrate. |
160 |
Adaptive manifold |
US09681380 |
2001-03-27 |
US20020141130A1 |
2002-10-03 |
James
C.
Lyke; Warren
G.
Wilson; Ren
H.
Broyles |
An adaptive electrical manifold is described comprised of switchbox assemblies containing a plurality of non-volatile MEMS relay switches, a means of controlling these switches, and a means of controlling a daisy-chained group of switchbox assemblies. |