序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
161 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus US11797605 2007-05-04 US07372544B2 2008-05-13 Masashi Tanaka; Masato Kumazawa; Kinya Kato; Masaki Kato; Hiroshi Chiba; Hiroshi Shirasu
An exposure apparatus includes a plurality of projection optical systems, each of which has optical elements arranged in an optical path between a first surface and a second surface and forms a radiation pattern from the first surface onto an exposure field on the second surface via the optical elements. The apparatus also includes a movable portion disposed in the side of the second surface with respect to the plurality of projection optical systems, which holds an object to be moved relative to the exposure field in a first direction during a scanning exposure of the object with the radiation patterns. Each of the plurality of projection optical systems is telecentric on the side of the second surface, and the exposure fields are arranged at different positions in a second direction crossing the first direction.
162 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus US11471658 2006-06-21 US07372543B2 2008-05-13 Masashi Tanaka; Masato Kumazawa; Kinya Kato; Masaki Kato; Hiroshi Chiba; Hiroshi Shirasu
An exposure apparatus includes a plurality of projection optical systems, each of which has optical elements arranged in an optical path between a first surface and a second surface and forms a radiation pattern from the first surface onto an exposure field on the second surface via the optical elements. The apparatus also includes a movable portion disposed in the side of the second surface with respect to the plurality of projection optical systems, which holds an object to be moved relative to the exposure field in a first direction during a scanning exposure of the object with the radiation patterns. Each of the plurality of projection optical systems is telecentric on the side of the second surface, and the exposure fields are arranged at different positions in a second direction crossing the first direction.
163 Light collimating device US11194360 2005-08-01 US07345824B2 2008-03-18 Neil D. Lubart; Timothy J. Wojciechowski; Thomas E. Lash
A collimating device and a transflector for use in a system having a backlight is disclosed herein. In one embodiment of the application, the collimating device and the transflector each include an immersing layer, a reflecting layer, and an optical element layer formed from a plurality of three-dimensional, optical elements. Each optical element is tapered such that a small area end has a horizontal plane cross-sectional area that is less than that of a wide area end. The optical elements of the collimating device are tapered towards the backlight and the optical elements of the transflector are tapered away from the backlight. The reflecting layer has apertures which correspond to the position and shape of the light input ends of the optical elements.
164 MICROMIRROR ARRY LENS WITH OPTICAL SURFACE PROFILES US11933105 2007-10-31 US20080049291A1 2008-02-28 Sang Baek; Jin Sohn; Gyoung Cho; Cheong Seo
A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.
165 Front projection screens including reflecting and refractive layers of differing spatial frequencies US11179162 2005-07-12 US07324276B2 2008-01-29 Robert L. Wood
Projection screens include a substrate, a reflective layer on the substrate and a refractive layer on the substrate. The reflective layer includes reflective microstructures of about 5 μm to about 500 μm in size, and arranged in a first pattern to reflect light at a first spatial frequency. The refractive layer includes refractive microstructures of about 5 μm to about 500 μm in size, and arranged in a second pattern that is different from the first pattern, to refract light at a second spatial frequency that is different than the first spatial frequency. Related fabrication methods also are described.
166 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus US11797605 2007-05-04 US20070216885A1 2007-09-20 Masashi Tanaka; Masato Kumazawa; Kinya Kato; Masaki Kato; Hiroshi Chiba; Hiroshi Shirasu
An exposure apparatus includes a plurality of projection optical systems, each of which has optical elements arranged in an optical path between a first surface and a second surface and forms a radiation pattern from the first surface onto an exposure field on the second surface via the optical elements. The apparatus also includes a movable portion disposed in the side of the second surface with respect to the plurality of projection optical systems, which holds an object to be moved relative to the exposure field in a first direction during a scanning exposure of the object with the radiation patterns. Each of the plurality of projection optical systems is telecentric on the side of the second surface, and the exposure fields are arranged at different positions in a second direction crossing the first direction.
167 LIGHT COLLIMINATING DEVICE US11686143 2007-03-14 US20070153396A1 2007-07-05 Neil Lubart; Timothy Wojeiechowski; Thomas Lash
A collimating device and a transflector for use in a system having a backlight is disclosed herein. In one embodiment of the application, the collimating device and the transflector each include an immersing layer, a reflecting layer, and an optical element layer formed from a plurality of three-dimensional, optical elements. Each optical element is tapered such that a small area end has a horizontal plane cross-sectional area that is less than that of a wide area end. The optical elements of the collimating device are tapered towards the backlight and the optical elements of the transflector are tapered away from the backlight. The reflecting layer has apertures which correspond to the position and shape of the light input ends of the optical elements.
168 Optical integrator, illumination optical device, exposure device, and exposure method US11647252 2006-12-29 US20070132977A1 2007-06-14 Hideki Komatsuda
An optical integrator of a wavefront dividing type permits an arbitrary distance to be set between an entrance surface and an exit surface, without production of aberration and without reduction in reflectance on reflecting films. The optical integrator has a plurality of first focusing elements (first concave reflector elements 18a) arranged in parallel, a plurality of second focusing elements (second concave reflector elements 20a) arranged in parallel so as to correspond to the first focusing elements, and a relay optical system (19) disposed in an optical path between the first focusing elements and the second focusing elements. The relay optical system refocuses a light beam focused via one of the first focusing elements, on or near a corresponding second focusing element so as to establish an imaging relation of one-to-one correspondence between one of the first focusing elements and one of the second focusing elements.
169 Image display device and adjustment for alignment US11235247 2005-09-27 US07230774B2 2007-06-12 Hiroshi Suzuki; Kohei Teramoto; Jiro Suzuki; Shinsuke Shikama
An image display device comprises an optical imaging arrangement for providing image information to illumination light and for transmitting the light as an optical image signal; a display for receiving the optical image signal and for displaying an image based on the image information; and a projecting optical arrangement including a reflecting part having a reflecting surface for reflecting the optical image signal, and a refracting optical part having a refracting surface for projecting the optical image signal onto the reflecting part. At least one of the reflecting surface and the refracting surface is aspherical.
170 Side-emitting collimator US11435682 2006-05-17 US20060291201A1 2006-12-28 Todd Smith
Illumination configurations employ optical elements configured to organize divergent light from an LED light source into collimated beams having a direction perpendicular to an optical axis of the LED. Alternative optical elements organize light from a row of LEDs into planes perpendicular to a plane including the optical axes of the LEDs. Pairs of optical elements are configured to define a cavity for receiving an LED. One optical element may be employed to organize approximately one half of the light generated by the LED, with the remainder being permitted to radiate from the LED in its usual pattern.
171 Method for making collimating or transflecting film having a reflective layer US11454521 2006-06-16 US20060291067A1 2006-12-28 Donald Davis; Neil Lubart; Timothy Wojciechowski; Thomas Lash; Karen Spilizewski
A method for manufacturing a collimating device is disclosed herein. In one embodiment the method includes a step of constructing a reflective layer. After the reflective layer is constructed, a step of constructing an optical element layer follows, including a step of forming an array of microstructures in the optical element layer. Next, the array of microstructures is abutted against the reflective layer. Heat and pressure are then applied to the optical element layer to puncture the reflective layer and penetrate a predetermined distance through the reflective layer. Sub-assemblies are also defined, wherein optical elements are coupled to prevent light loss.
172 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus US11471658 2006-06-21 US20060238729A1 2006-10-26 Masashi Tanaka; Masato Kumazawa; Kinya Kato; Masaki Kato; Hiroshi Chiba; Hiroshi Shirasu
An exposure apparatus includes a plurality of projection optical systems, each of which has optical elements arranged in an optical path between a first surface and a second surface and forms a radiation pattern from the first surface onto an exposure field on the second surface via the optical elements. The apparatus also includes a movable portion disposed in the side of the second surface with respect to the plurality of projection optical systems, which holds an object to be moved relative to the exposure field in a first direction during a scanning exposure of the object with the radiation patterns. Each of the plurality of projection optical systems is telecentric on the side of the second surface, and the exposure fields are arranged at different positions in a second direction crossing the first direction.
173 Image display device and adjustment for alignment US11235247 2005-09-27 US20060098294A1 2006-05-11 Hiroshi Suzuki; Kohei Teramoto; Jiro Suzuki; Shinsuke Shikama
An image display device comprises an optical imaging arrangement for providing image information to illumination light and for transmitting the light as an optical image signal; a display for receiving the optical image signal and for displaying an image based on the image information; and a projecting optical arrangement including a reflecting part having a reflecting surface for reflecting the optical image signal, and a refracting optical part having a refracting surface for projecting the optical image signal onto the reflecting part. At least one of the reflecting surface and the refracting surface is aspherical.
174 Cylindrical microlens with an internally reflecting surface and a method of fabrication US10741047 2003-12-18 US20040129025A1 2004-07-08 Raymond J. Beach; Barry L. Freitas
A fast (high numerical aperture) cylindrical microlens, which includes an internally reflective surface, that functions to deviate the direction of the light that enters the lens from its original propagation direction is employed in optically conditioning laser diodes, laser diode arrays and laser diode bars.
175 Image display device and adjustment for alignment US09852031 2001-05-10 US20010050758A1 2001-12-13 Hiroshi Suzuki; Kohei Teramoto; Jiro Suzuki; Shinsuke Shikama
A refracting optical lens 15 is provided to project light from transmitting means onto a convex mirror 16 to correct for pincushion distortion of the convex mirror 16.
176 Solar concentrator array US379254 1999-08-23 US6091017A 2000-07-18 Theodore G. Stern
A high efficiency, light weight solar concentrator array particularly suitable for use with space vehicles. Parallel rows of mirror assemblies are mounted on a base plate having high thermal conductivity. Each mirror assembly comprises back-to-back mirror strips having reflecting front faces. Photovoltaic cells are placed ion the base plate between rows of mirror assemblies. The reflecting faces reflect incident light to the photovoltaic cells to produce electric power. Preferably, the reflecting faces have a cylindrical parabolic configuration with a line of focus approximately along the interface between the photovoltaic cell and the edge of the opposite mirror strip adjacent to the cell. The mirror strips may typically be roll formed from metal strips, cast from fiber reinforced plastic material and coated with a reflecting layers, etc. The rows may be mounted on the base plate by strips across the ends of mirror assemblies, or by additional mirror assemblies arranged transverse to the original mirror assembles.
177 Lighting system with a micro-telescope integrated in a transparent plate US719547 1996-09-25 US5841596A 1998-11-24 Piero Perlo; Luca Sardi; Sabino Sinesi
The light radiation beam emitted by a source of finite dimension, integrated in a transparent plate or in contact therewith, is initially reflected inside the plate by a first surface located on the side of the plate (3) which is more remote from the source. The reflected light rays pass through plate and are again reflected by a second surface having micro projections and then directed outwardly, according to a micro-telescope arrangement.
178 Dual aperture multispectral Schmidt objective US378535 1982-05-13 US4444464A 1984-04-24 Peter O. Minott
A dual aperture, off-axis catadioptic Schmidt objective (40) is formed by symmetrically aligning two pairs of Schmidt objectives (12, 14) on opposite sides of a common plane (x, z). Each objective has a spherical primary mirror (16/18) with a spherical focal plane (44/46) and center of curvature (20/22) aligned along an optic axis (36/38) laterally spaced apart from the common plane. A multiprism beamsplitter (44/46) with buried dichroic layers (81-83) and a convex entrance (48) and concave exit (52a-52f) surfaces optically concentric to the center of curvature may be positioned at the focal plane. The primary mirrors of each objective may be connected rigidly together and may have equal or unequal focal lengths.
179 METHOD FOR MAKING COLLIMATING OR TRANSFLECTING FILM HAVING A REFLECTING LAYER PCT/US2007000789 2007-01-11 WO2007149128A3 2009-04-09 DAVIS DONALD J; LUBART NEIL D; WOJCIECHOWSKI TIMOTHY J; LASH THOMAS E; SPILIZEWSKI KAREN
A method for manufacturing a collimating device is disclosed herein. In one embodiment the method includes a step of constructing a reflective layer. After the reflective layer is constructed, a step of constructing an optical element layer follows, including a step of forming an array of microstructures in the optical element layer. Next, the array of microstructures is abutted against the reflective layer. Heat and pressure are then applied to the optical element layer to puncture the reflective layer and penetrate a predetermined distance through the reflective layer. Sub-assemblies are also defined, wherein optical elements are coupled to prevent light loss.
180 LIGHT COLLIMATING DEVICE PCT/US2005028217 2005-08-09 WO2006020610A3 2006-12-14 LUBART NEIL D; WOJCIECHOWSKI TIMOTHY J; LASH THOMAS E
A collimating device and a transflector for use in a system having a backlight is disclosed herein. In one embodiment of the application, the collimating device and the transflector each include an immersing layer, a reflecting layer, and an optical element layer formed from a plurality of three-dimensional, optical elements. Each optical element is tapered such that a small area end has a horizontal plane cross sectional area that is less than that of a wide area end. The optical elements of the collimating device are tapered towards the backlight and the optical elements of the transflector are tapered away from the backlight. The reflecting layer has apertures which correspond to the position and shape of the light input ends of the optical elements.
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