子分类：
| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 161 | JPS5050959A - | JP7421774 | 1974-06-28 | JPS5050959A | 1975-05-07 | |
| 162 | 滴下検出装置 | JP2017538537 | 2016-09-09 | JP6315149B2 | 2018-04-25 | 平田 篤彦; 近藤 靖浩; 宮林 弘治 |
| 163 | 内燃機関のシリンダ吸入空気量推定装置および推定方法 | JP2014084679 | 2014-04-16 | JP5865942B2 | 2016-02-17 | 葉狩 秀樹 |
| 164 | Trace amounts of fluid processing apparatus | JP2007307569 | 2007-11-28 | JP4783776B2 | 2011-09-28 | ヴィルヘム・ヨット・メイヤー; ニコラス・エス・チブコス; リチャード・イー・ペルク; レーラント・エフ・パペン |
| 165 | Process and system for determining the acceptability of a fluid dispensing | JP2002503455 | 2000-06-19 | JP2003536265A | 2003-12-02 | シユー，ジエー−フア; ピリオン，ジヨン・イー; マクローリン，ロバート・エフ |
| (57)【要約】 基板をコーティングするために使用される流体の個別容積３０等の、流体分与の許容性を判断するためのプロセスおよびシステムを提供する。 流体分与がエネルギ源１６、２４に晒され、流体分与によって伝達されたエネルギが検出されることにより、流体分与のプロファイルが決定される。 流体分与プロファイルと、分与の開始および終了時間とは、既に形成された標準的な分与プロファイルと比較され、流体分与の形状および／またはタイミングの許容性を決定するために使用される。 センサ１８、２６からの出力は、基板の更なる処理を制御するために使用される。 | ||||||
| 166 | Distribution of the droplets to the brittle porous substrate | JP2001553035 | 2001-01-11 | JP2003520127A | 2003-07-02 | パペン，レーランド・イー |
| (57)【要約】 微小量の液滴２６を吸引し且つ基板のウェーハの多孔質部分に射出する装置は、ガラス毛細管６２に取り付けられた圧電変換器６０を採用するマイクロディスペンサ１６と、装置液体２０の圧力を制御すると共に、液体を移送する間にマイクロディスペンサ１６を洗浄すべく移送液体２４を充填し且つマイクロディスペンサ１６内に吸引する手段と、装置液体の圧力を測定し且つ相応する電気信号を発生させる圧力センサ１４とを備えている。 液滴は、全体として、１０乃至１００μｍの範囲にあり、孔は全体としてその上に置かれた液滴の直径よりも１０乃至１０，０００倍小さい。 形成される箇所は均一であり、液滴の直径よりも僅かだけ大きい。 液滴は液滴の直径よりも長い距離から射出され、これにより、ウェーハを損傷させる可能性のあるディスペンサとの接触を防止する。 装置は反応部分への液滴の分配を検出する。 | ||||||
| 167 | A method and apparatus for measuring a value corresponding to the mass and milk flow rate corresponding to this milk slug | JP11949992 | 1992-03-27 | JP3197608B2 | 2001-08-13 | ホエフェルマイエル ティルマン; マイエル ユン ヤコブ |
| 168 | Liquid flow rate measuring method and apparatus using the method | JP50833293 | 1992-10-28 | JP3110458B2 | 2000-11-20 | ロエロフス，ベルナルダス，ヨハネス，ゲラルダス，マリア |
| 169 | JPH07500669A - | JP50833293 | 1992-10-28 | JPH07500669A | 1995-01-19 | |
| 170 | JPS6348289B2 - | JP6663081 | 1981-04-30 | JPS6348289B2 | 1988-09-28 | KIRI MOTOSADA |
| 171 | JPS6237995B2 - | JP9028478 | 1978-07-24 | JPS6237995B2 | 1987-08-14 | MURASE SHOICHI |
| A counter counts the time intervals of falling instilled drops in response to a signal issued each time a falling instilled drop is detected. A memory is supplied with data representing the quantities of a falling instilled drop corresponding to the time intervals at which the drops fall. The data corresponding to the time intervals thereof which have been counted by the counter are read out of the memory. The data thus read out are accumulated to determine the total quantities of the drops. | ||||||
| 172 | JPS6047530B2 - | JP3387081 | 1981-03-11 | JPS6047530B2 | 1985-10-22 | WATANABE HIDEHIRO |
| 173 | Flow rate measuring device | JP24238283 | 1983-12-21 | JPS60133319A | 1985-07-16 | MANABE TAKUROU |
| PURPOSE:To measure even a minute flow rate accurately and readily, by measuring the time period, during which a separating body such as a bubble that separates a fluid in a pipe moves over a specified distance between two points together with the fluid. CONSTITUTION:Solenoid valves 11 and 14 are opened and 12 and 13 are closed, and a fluid 1 is made to flow clockwise in a measuring pipe part 3. A separated body 8 formed at this time moves in the pipe part 3 together with the fluid 1. Said separated body 8 is detected by photoelectric sensors 9 and 10. A flow rate is obtained from the time period, during which the separated body 8 passes the part between both sensors 9 and 10. When the separating body 8 passes the sensor 10, the solenoid valves 12 and 13 are opened and 11 and 14 are closed, and the fluid 1 is made to flow counterclockwise. Then the separating body 8 flows in the reverse direction together with the fluid 1 in the pipe part 3, and the flow rate is measured again. This operation is repeated and the flow rate can be continuously measured. Thus even the minute flow rate can be measured accurately and readily. | ||||||
| 174 | Minute-flow-rate measuring device | JP14903983 | 1983-08-15 | JPS6040913A | 1985-03-04 | NOZAKI KAZUO; TSUCHIYA HIROYA |
| PURPOSE:To measure a minute flow rate highly accurately over the broad range of the flow rate, by the constitution, wherein the fall of a liquid droplet is detected, and the dropped liquid is made to flow through a thin pipe as a continuous stream. CONSTITUTION:A liquid enters a dropping pipe 2, which is provided at the upper part of a measuring container 1. The liquid receives a specified surface tension at an outer opening part 21 and falls as a specified droplet 3. The droplet is detected by the conduction between electrodes 41 and 42. The liquid reaches a concave part 8 of a flowout pipe part 6, which can be attached and detached freely, through the electrode 42. The liquid becomes a continuous stream, whose flow rate is the same as the flow rate of the liquid entering the dropping pipe 2, through a thin pipe 11 and flows out. Since the droplet 3 is kept in constant conditions all the time, the minute flow rate is measured highly accurately. | ||||||
| 175 | Band type flow meter | JP14990582 | 1982-08-31 | JPS5940118A | 1984-03-05 | OSADA SHIGEYOSHI |
| PURPOSE:To limit the vibration area of the downstream end part of a band piece and to prevent its fatigue destruction by providing swelling parts in the internal wall of a housing on both sides of the downstream-side fixation part of the band piece. CONSTITUTION:When fluid from an intake 1a is admitted to flow, the wavelength lambda2'' on the downstream side becomes shorter than the wavelength lambda1'' as shown by a curve 2'' and the part near the fixed shaft 2b of the band piece 2 is swept away to the downstream side; and its waveform tends to swell to the downstream side and it is further flowed to the downstream side beyond the fixed shaft 2b as shown by the curve 2'', and inflection is caused at wide angles to cause fatigue, so that destruction occurs finally. For this purpose, the swelling parts 4a and 4b are fixed to the internal wall of the housing 1. The height is 20-30% of the distance between parallel internal walls 1e and 1f and the upstream-side slanting surfaces are set at such positions and angles that the band piece 2 vibrates nearly in a sine waveform shape. Thus, the vibration range of the band piece near the fixed shaft 2b is limited and its waveform is held constant to prevent the fatigue destruction of the fixed part of the downstream-side band. | ||||||
| 176 | Neutron detector | JP12101382 | 1982-07-12 | JPS5912376A | 1984-01-23 | MATSUI YOSHIROU |
| PURPOSE:To remove a radioactive clad accumulated in a housing quickly and easily by providing a discharge mechanism adapted to discharge a radioactive material accumulated with the fluidization of a reactor water in the housing having a connection pipe connected to the opening side of a passage and opening/closing valve. CONSTITUTION:An internal space of a housing 6 is communicated with a pressure/vessel of a nuclear reactor and as an opening/closing valve 16 is opened or closed, a reactor water flows out through a connection pipe 14 and the opening/closing valve 16 depending on the water head in the pressure vessel. At this point, a radioactive clad, a radioactive material accumulated in the housing 6 flows outside with the fluidization of the reactor water. Thus, the radioactive clad in the housing 6 can be removed only by an action for opening the opening/ closing valve 16. This only requires the opening or closing of the opening/closing valve 16 outside the pedestal of the nuclear reactor high in the radiation level thus eliminating the need for worker's entry thereinto. | ||||||
| 177 | Electrostatic capacity comparing type passing variable measuring device | JP17868881 | 1981-11-07 | JPS5880521A | 1983-05-14 | KATOU RIYOUCHI |
| PURPOSE:To simplify initial adjustment and to improve measuring accuracy with simple constitution, by comparing electrostatic capacitles from a pair of electrostatic capacity converters and measuring the passed variable of an object from the dissidence of electrostatic capacity. CONSTITUTION:When a medical fluid 23 is dropped from a chemical fluid supplying tube 21, electrostatic capacity values detected by a pair of electrostatic capacity changing type converters 31, 32 are successively changed from the equal original values at every different period. In accordance with the dissidence of detected values due to said change of electrostatic capacity a capacity comparator 24 outputs a dissidence pulse, and the pulse is counted by a pulse counter 25 to measure the passed variable of the medical fluid or the like. Consequently, said simple constitution using the variation of electrostatic capacity does not require optical detection of drops, simplifying initial adjustment and improving measuring accuracy without influences of deterioration for a long time. | ||||||
| 178 | JPS5813854B2 - | JP7421774 | 1974-06-28 | JPS5813854B2 | 1983-03-16 | HANSU UIRUHERUMU FUARENTEIN; KURUTO SHUMAIZERU; PAURU BOITO |
| 179 | Feeder for fixed quantity of liquid | JP7395181 | 1981-05-15 | JPS57194913A | 1982-11-30 | KAWAKAMI SHIGEZOU; OMURA HIROSHI; OGAWA KATSUMI |
| 180 | Dropping type flow rate control device | JP7337581 | 1981-05-18 | JPS57192824A | 1982-11-27 | MATSUMURA MORIJI; SEKI MASAHARU |
| PURPOSE:To make it possible to control the minute flor rate by providing a temperature detecting terminal whose temperature is kept at a specified temperature different from the temperature of fluid to be measured in a dropping path of the fluid in a dropping part, and converting the dropping of the fluid from the temperature detecting terminal into an electric signal. CONSTITUTION:A thirmistor 106 which detects the dropping of an oil agent is mounted in such a way that its temperature sensing part 106' is located at the dropping path of the oil agent which is formed under a nozzle 105 in the vertical direction. Said thirmistor 106 is connected to a detecting circuit 200 by wirings 110 and 110'. The temperature of the thirmistor is kept at the specified temperature by the detecting circuit 200. The dropping speed of the oil agent is detected by the change in the temperature. In the device having such a constitution, the dropping of the fluid to the temperature sensing part 106' of the thirmistor 106 is converted into the electrical signal. Thus the minute flow rate circuit can be controlled. | ||||||
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