An object of the present invention is to provide a uniaxial eccentric screw pump capable of transferring and filling a fluid while realizing high flow rate accuracy, low pulsation, and long life.

A uniaxial eccentric screw pump (11) in which an external screw type rotor (12) is fittingly inserted in an inner hole (13a) of an internal screw type stator (13), the rotor (12) and the stator (13) are separately, rotatably supported, and a rotation central axis of the rotor (12) and a rotation central axis of the stator (13) are spaced apart from each other is configured such that the rotor (12) and the stator (13) are separately rotated by a rotor driving portion (27) and a stator driving portion (19), respectively, and the rotor (12) and the stator (13) are rotated with the rotor (12) and the stator (13) not contacting each other.

Die Erfindung bezieht sich auf eine Pumpe zur Förderung von Flüssigkeiten, von mit Partikeln beladenen Flüssigkeiten oder von Fluiden. Ein Paar miteinander kämmender, zueinander identischer Drehkolben werden von Motoren angetrieben, sind in einem Pumpengehäuse gelagert und übertragen stets die gleichen Drehmomente auf die Drehkolben.

Die Verdrängermaschine für kompressible Medien, insbesondere trockenlaufende Vakuumpumpe, mit mindestens zwei Wellen (3) mit Rotoren (4), die als schraubenförmige Profilkörper (4) ausgebildet sind und deren Profile bei der Drehung zahnradartig ineinandergreifen und berührungsfrei zueinanderlaufen, wobei die Steigung der schraubenförmigen Profilkörper vom Einlaß zum Auslaß abnimmt, zeichnet sich dadurch aus, daß die schraubenförmigen Profilkörper (4) zweitgängig ausgebildet sind und die Steigungen (S₁, S₃) am Einlaßende und Auslaßende der schraubenförmigen Profilkörper (4) konstant sind und dazwischen von der größeren Steigung (S₁)am Einlaßende zur kleineren Steigung (S₃) am Auslaßende die Steigung (S₂) kontinuierlich abnimmt.

A vacuum pump has a pump casing having a suction side where a suction port is located and a discharge side where a discharge port is located, a pump assembly housed in the pump casing and comprising a pair of pump rotors rotatable in synchronism with each other and having respective shafts, and a brushless direct-current motor mounted on the pump casing at a suction side of the pump casing. The motor has a pair of motor rotors comprising respective sets of permanent magnets which are mounted respectively on the shafts, a pair of cans surrounding outer circumferential and end surfaces of the motor rotors in sealing relation to the pump assembly, a motor stator mounted on the cans and housed in a water-cooled motor frame.

In a screw fluid machine including male and female rotors which are engaged with each other, a casing for accommodating both the male and female rotors, fluid working rooms which are formed by the male and female rotors and the casing, and fluid inlet and outlet ports which are provided in the casing so as to intercommunicate with one end portion and the other end portion of the working rooms, the helix angle of the screw gear constituting each of the male and female rotors is set to be continuously varied in a helix advance direction. Further, the screw gear is designed so that the peripheral length of a pitch cylinder in a helix advance direction on a development of a tooth-trace rolling curve on the pitch cylinder of the screw gear can be expressed by a substantially monotonically increasing function.

In a screw fluid machine including male and female rotors which are engaged with each other, a casing for accommodating both the male and female rotors, fluid working rooms which are formed by the male and female rotors and the casing, and fluid inlet and outlet ports which are provided in the casing so as to intercommunicate with one end portion and the other end portion of the working rooms, the helix angle of the screw gear constituting each of the male and female rotors is set to be continuously varied in a helix advance direction. Further, the screw gear is designed so that the peripheral length of a pitch cylinder in a helix advance direction on a development of a tooth-trace rolling curve on the pitch cylinder of the screw gear can be expressed by a substantially monotonically increasing function.

A fluid rotating apparatus according to the present invention is designed to achieve an extreme high degree of vacuum from the atmospheric pressure promptly by its single apparatus. Moreover, high-speed synchronous rotation of the rotary shafts (2,3,202,203) of the apparatus is controlled by use of a rotary position detecting sensor (291-296), thereby avoiding control through mechanical contact therewith with a gear or the like. Besides, the apparatus is rid of mechanical abrasion or use of a lubricant oil by employing hydrostatic bearings for the rotary shafts.

A fluid rotating apparatus according to the present invention is designed to achieve an extreme high degree of vacuum from the atmospheric pressure promptly by its single apparatus. Moreover, high-speed synchronous rotation of the rotary shafts (202,203) of the apparatus is controlled by use of a rotary position detecting sensor (208-209), thereby avoiding control through mechanical contact therewith with a gear or the like. Besides, the apparatus is rid of mechanical abrasion or use of a lubricant oil by employing hydrostatic bearings for the rotary shafts.

Pompe permettant d'atteindre un vide moléculaire, comprenant un stator (1) et un ensemble rotorique comportant deux rotors, à axes parallèles (4, 5), tournant en sens inverse, le stator comportant une entrée d'aspiration (2) et une sortie de refoulement (3), caractérisée en ce qu'elle se divise axialement en une première zone (A) située du côté de l'aspiration, suivie d'une seconde zone (B), ladite première zone étant du type turbomoléculaire à ailettes à deux rotors, ladite seconde zone (B) étant du type à deux pistons rotatifs ou à vis, à deux axes parallèles, l'un (4) des axes étant entraîné par un moteur (20) et l'autre par l'intermédiaire de moyens de transmission (8, 9).