子分类：
| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 161 | Fluid drive equipment, chemical analysis apparatus and a fluid driving method | JP13023594 | 1994-06-13 | JP3595883B2 | 2004-12-02 | 亮 三宅; 弘 三巻; 功夫 山崎; 英雄 榎; 雅治 石井 |
| PURPOSE:To enable the generation of flow to a fluid without inserting any external object in the fluid in a passage or a tank. CONSTITUTION:A fluid 12 is stored between a flat plate 10 and a flat plate 11, and the flat plate 10 is placed on plural supports 14 provided on a stationary base 13. A driving plate 15 is fixed to the bottom face of the flat plate 10, and a fixed plate 16 is fixed to the stationary base 13. A piezoelectric element 17 is provided between the driving plate 15 and the fixed plate 16. When sawtooth voltage with steep rise and easy fall is applied to the piezoelectric element 17 from a driver 18, the piezoelectric element 17 repeats expansion and contraction, and the driving plate 15 is vibrated with speed vectors 20, 21 different in size by the expansion and contraction, and flow can be generated to the fluid 12 by this vibration. | ||||||
| 162 | Micro pump | JP2003500417 | 2002-05-24 | JP2004530073A | 2004-09-30 | デイビッド， マーク ブレイキー， |
| 本発明は、交互に変位される穿孔エレメントと、閉鎖エレメントとを使用する流体ポンプを提供するもので、専らではないが特には、小型流体ポンプ及び液状薬剤の送出に適したポンプに関するものである。 小型流体ポンプの分野では、蠕動及び“ポンプ室”原理に基づくポンプが知られている。 （蠕動ポンプは、流体全般に、即ち液体又は気体をポンプ送りするのに使用することができる。）両型式のポンプは液体薬剤の送出のための歩行用ポンプ製品に使用され、斯かる応用にとっては、小型化及び軽量が重要な属性である。 | ||||||
| 163 | Fluid transfer system | JP2000615496 | 2000-04-27 | JP2002543339A | 2002-12-17 | エス． サゴヴ，マゴメット |
| (57)【要約】 本発明は、ポンプに関する。 このポンプは、その動作モードによって、移送させるべき流体中に波を作り出すような振動運動を利用して、流体を移動させる。 ポンプは、部分的には、位置エネルギー（弾性エネルギー）と運動エネルギーとの間のエネルギー変換に基づいている。 位置エネルギー（弾性エネルギー）と運動エネルギーとの和は常に一定である。 本発明による流体を移動させるためのポンプは、流体を供給されるハウジングと、一以上のバルブ系とからなる。 ここで、ハウジング内部には、一以上の振動機構が流体流にさらされるようにして設けられている。 振動機構は、運動エネルギーを累積する慣性エレメントを少なくとも一つを備えており、更に、位置エネルギー（弾性エネルギー）を累積するエネルギー累積装置を少なくとも一つ備えている。 振動機構は、第１の位置（Ｐ１）及び第２の位置（Ｐ２）間において制御された一段の機械的な振動を生成するようにして配置されている。 慣性エレメントは、位置エネルギー（弾性エネルギー）用のエネルギー累積装置の第一の端部位置に位置している。 エネルギー累積装置は、慣性エレメント（１）を第１及び第２の位置（Ｐ１，Ｐ２）間におけるニュートラル位置（中立位置）にキープしようとする。 位置エネルギー（弾性エネルギー）用のエネルギー累積装置の一つは、振動外部動力源（５）により駆動される。 | ||||||
| 164 | Pressure wave generator | JP2000150447 | 2000-05-22 | JP2001330000A | 2001-11-30 | SUGIMOTO NOBUMASA; MASUDA MITSUHIRO |
| PROBLEM TO BE SOLVED: To suppress the generation of shock wave to obtain a pressure wave having a larger amplitude than the conventional one in a pressure wave generator constituted by connecting an acoustic driving device 3 for radiating an acoustic wave into the tube to the end of an sound tube 1. SOLUTION: In this pressure wave generator, plural Helmholtz resonators 2 having an flow passage communicating with the inside of the sound tube 1 are arranged in a tube wall of the sound tube 1 at regular intervals in the tube axial direction of the sound tube 1. Each Helmholtz resonator 2 is composed of a throat part 21 having a narrower passage than the sound tube 1 and whose base end part is connected to the tube wall of the sound tube 1; and a cavity part 22 having constant volume and connected to the tip part of the throat part 21 for enlarging the passage of the throat part 21. COPYRIGHT: (C)2001,JPO | ||||||
| 165 | Ultrasonic cleaning equipment | JP32521097 | 1997-11-11 | JP3154685B2 | 2001-04-09 | 勝一 岡野 |
| 166 | Pump comprising mechanism for applying periodic rotational inertia force to tubular circuit system and causing internal liquid to generate continuous pressure and flow | JP16005099 | 1999-06-07 | JP2000346000A | 2000-12-12 | FRANCH GINO |
| PROBLEM TO BE SOLVED: To provide a pump low in manufacturing costs by putting two rotors in action periodically and alternately at a specified relative phase angle so as to make regenerative element force act on liquid in two phase circuits formed of two tubes connected in parallel, to generate flow. SOLUTION: A pump is constituted to transmit periodic rotational inertia force to a tubular circuit system to generate continuous pressure and flow to internal liquid. A tubular circuit is composed of a parallel circuit formed of two identical tubular circuits C1, C1', and the respective tubular circuits C1, C1' are provided with common inlet and outlet tubes E1, U1 for liquid. The respective tubular circuits C1, C1' are fixed to a rotor and impart periodic vibration of sine wave. In a crank turning angle range θ, positive inertia element force thereby acts on all points of liquid in the circuit C1 to generate liquid flow. | ||||||
| 167 | Chemical supplying pump, chemical supplying device, chemical supplying system, substrate cleaning device, chemical supplying method, and substrate cleaning method | JP31624499 | 1999-11-08 | JP2000265945A | 2000-09-26 | YAMAGUCHI YOSHIAKI; NITTA TAKEHISA; MIKI MASAHIRO |
| PROBLEM TO BE SOLVED: To achieve drastic miniaturization and simplification of a cleaning fluid supplying system including a chemical tank, to easily and quickly prepare and supply cleaning fluid having the accurate chemical density, and to restrain particles from being generated and contaminated in to cleaning fluid. SOLUTION: A chemical supplying system 2 is constituted of a chemical storage tank 21 for storing chemical for cleaning in the stock solution state, a chemical supplying device 22 connected to the chemical storage tank 21 and for actively perform chemical supply, a piping system 23 connected to the chemical supplying device 22 and for forming a supply passage taken as a passage for super pure water to be mixed to chemical, and a pair of discharge nozzles 24, 25 provided on the ends of the piping system 23 so as to face respective front surfaces of a wafer 11 installed in a washing chamber 1 and for supplying cleaning fluid to respective front surfaces. | ||||||
| 168 | Wind-electric converter | JP182999 | 1999-01-07 | JP2000205106A | 2000-07-25 | TAKEUCHI TADASHI; TANI KENROKU |
| PROBLEM TO BE SOLVED: To provide a wind-electric converter of simple structure to be used as a blower, wind force meter, wind force power-generating device, etc. SOLUTION: A plurality of piezoelectric vibrators 3 structured so that a a piezoelectric element is joined with one side or two sides of a flexible metal plate are supported on the periphery of a rotor 2 supported as capable of idling in a cantilever form in such a way as inclining with respect to the circumferential direction, whereby it is possible to feed winds or generate voltage output using a simple configuration, and this can be optimally used as a blower, wind force meter, wind force power-generating device, etc. COPYRIGHT: (C)2000,JPO | ||||||
| 169 | Pump constituted of mechanism imparting periodic rotary inertial force to tubular circuit system and generating continuous pressure and flow in liquid at the inside | JP16277199 | 1999-06-09 | JP2000035000A | 2000-02-02 | FRANCH GINO |
| PROBLEM TO BE SOLVED: To generate extremely slight hydraulic loss by generating pressure differences of specified expressions at all the points of internal liquid, changing elements of the expression and adjusting pressure by rotary inertial force along a shaft of a tubular circuit. SOLUTION: Acceleration is imparted to a two-phase pump, for instance, by the same frequency, the pump is connected with each rotor having relative phases = 0°, 90° and the pump is constituted of two-phase circuits CB1, CB2 of serially connected tubes. Circuit C1, C1' of the circuit CB1 generate each inertial force in liquid at a rotary angle range θ (0°; 180°, 180°; 360°) of a rotor. From the peak, differential pressure of expressions I, II (ρ is density of liquid, ϕ0 is peak period rotary angle of the rotor, S0 is surface area of a projection of the circuit CB1 on a plane) is generated between exits E1, U1. Therefore, a pressure difference of an expression III (|sin θ| is an absolute value of sin θand θ is angular speed of the rotor) is generated at the rotary angle range θ(0°; 360°). Pressure can be easily adjusted by changing S0, ϕ0, θ. COPYRIGHT: (C)2000,JPO | ||||||
| 170 | Ultrasonic cleaning equipment | JP1410292 | 1992-01-29 | JP2989707B2 | 1999-12-13 | TAKAHASHI SEIGO; GOTO TOMOTAKA; OKANO KATSUICHI |
| 171 | Closed type cleaning device and cleaning of precision substrate using the same | JP25275097 | 1997-09-02 | JPH1176962A | 1999-03-23 | SADAKANE KOJI; NITTA TAKEHISA |
| PROBLEM TO BE SOLVED: To improve the cleaning throughput of the substrates by jetting a cleaning liquid to which high-frequency waves or ultrasonic waves are applied, toward the rear of a substrate to be cleaned, and also, jetting a cleaning liquid to which high-frequency waves or ultrasonic waves are not directly applied, toward the surface of the substrate. SOLUTION: In this device, a cleaning liquid supply pipe 12 upwardly extending from below through the inside of a cylindrical stationary shaft 5, is connected to a lower nozzle set 9 to supply a cleaning liquid to the lower nozzle set 9. When a vibrator (or piezoelectric transducer) is actuated while supplying the cleaning liquid to the lower nozzle set 9, the cleaning liquid to which high-frequency waves (or ultrasonic waves) are applied, can be jetted out from the lower nozzle set 9 toward the rear of a substrate to be cleaned 2, wherein the length in the horizontal direction of the lower nozzle set 9 is almost equal to the radius of the substrate 2. On the other hand, a wide upper nozzle 15 is placed at the lower end of another cleaning liquid supply pipe 14 so as to locate the upper nozzle 15 above the substrate 2, wherein the upper nozzle 15 is provided with a cleaning liquid jetting port 16 formed in the lower surface of the nozzle 15 and the length in the horizontal direction of the upper nozzle 15 is also almost equal to the radius of the substrate 2. When a cleaning liquid is supplied from the cleaning liquid supply pipe 14 to the upper nozzle 15, the cleaning liquid to which high-frequency waves or ultrasonic waves are not directly applied, can be jetted out from the upper nozzle 15 toward the surface of the substrate 2. | ||||||
| 172 | Ultrasonic pump | JP3804397 | 1997-02-21 | JPH10238500A | 1998-09-08 | YAMAGUCHI KOICHI |
| PROBLEM TO BE SOLVED: To provide an ultrasonic pump that is easily varied in sectional area of the passage portion of its communicating hole within a same shaft body, despite its easier manufacture. SOLUTION: An ultrasonic pump sucks up fluid in its holder container through a fluid suction port 14 at the lower end of a shaft body 10 with ultrasonic waves that its ultrasonic wave generator means, and discharges the fluid lead upward by a communicating hole 16 from a fluid discharge port 12. The hole 16 receives an insertion member 40 inserted therein. The selective insertion of a desired insertion member 410 depending on the type of fluid facilitates the control of the sectional area of the passage portion of the hole 16 that leads fluid upward. | ||||||
| 173 | Fluid transport device | JP29362396 | 1996-11-06 | JPH10141300A | 1998-05-26 | TSUTSUI TOSHIHIRO; SHIMANAKA KENJI; TAKATO KEIICHIRO; MIYANAGA KIICHIRO |
| PROBLEM TO BE SOLVED: To improve transport capacity of a fluid in a flow passage having a narrow width by forming an end part of an upstream side as a fixed end, forming an end part of a downstream side as a free end, dividing a plate shaped cantilever oscillator to be oscillated into a plurality of fine oscillators, and arranging the fine oscillators on a front and rear multistage along the flow direction of the fluid in the flow passage of the fluid. SOLUTION: Fine oscillator 2 whose length is 10mm are on a front and rear multistage along the flow direction of a fluid, in a flow passage fixed by a flow passage wall 1a (A). Each oscillator 2 is formed by laminating a piezoelectric film on a metal foil, and is fixed to a supporting rod 3 which an end part of an upstream side of the flow direction of the fluid is horizontally arranged in the flow passage 1. The piezoelectric film is expanded/contracted in the flow direction by applying alternating voltage, the oscillators 2 are oscillated serving the end part of the downstream side of the flow direction as a free end. When the oscillators 2 are arranged in a multistage condition, static pressure in the flow passage 1 is raised step by step per oscillator 2, add thereby, it is possible to increase static pressure at an outlet of the flow passage 1 (B). It is thus possible to improve transport capacity in the flow passage having a narrow width. COPYRIGHT: (C)1998,JPO | ||||||
| 174 | Resonance pump | JP29098596 | 1996-09-27 | JPH10103300A | 1998-04-21 | ROKURODA TAKESHI |
| PROBLEM TO BE SOLVED: To provide a pump of a system in which resonance is generated in a container and obtain an intake/discharge power based on a fluid behavior by the resonance as a principle. SOLUTION: An oscillator 3 is arranged for vibrating a fluid 1 in a container 2. An intake/discharge port 4 for taking out (or supplying) the fluid is provided in the container 2. COPYRIGHT: (C)1998,JPO | ||||||
| 175 | Vibration pillar pump | JP1671492 | 1992-01-31 | JP2584561B2 | 1997-02-26 | MORI SATOSHI; HYAMA HIROKUNI; HASHIMOTO HIROYUKI |
| 176 | Vibration pillar pump | JP21387791 | 1991-08-26 | JP2584554B2 | 1997-02-26 | HYAMA HIROKUNI; MAEKAWA TOSHIRO |
| 177 | Ultrasonic cleaning equipment | JP25047786 | 1986-10-20 | JP2521730B2 | 1996-08-07 | HONDA KEISUKE |
| 178 | Fluid driving method according to ultrasound | JP7967890 | 1990-03-28 | JPH07111200B2 | 1995-11-29 | 秀人 三留 |
| 179 | Pneumatic conveying method using vibrational flow by means of sound resonance | JP5795994 | 1994-03-29 | JPH07269500A | 1995-10-17 | MORITA MITSUNORI |
| PURPOSE: To realize a pneumatic conveying method secured with the same fluidized condition with less energy by increasing the extent of fluidization velocity as well as imparting flow stirring reinforcement. CONSTITUTION: A vibrational flow by means of acoustic energy is propagated to a blowing fluid of less than 30m/sec in nozzle discharge velocity, utilizing this vibrational flow by means of sound resonance for pneumatic conveyance serving as energy-saving. This vibrational flow can be used for cooling, heating, burning and the like. COPYRIGHT: (C)1995,JPO | ||||||
| 180 | Liquid transfer device | JP25167992 | 1992-09-21 | JPH06101700A | 1994-04-12 | SHIBANO YOSHIHIDE |
| PURPOSE:To provide an ultrasonic pump capable of stably supplying liquid into a liquid conduit having mum order of a fine bore. CONSTITUTION:An ultrasonic pump 7 is provided with a nozzle 8 capable of receiving deaerated liquid therein, a liquid donduit 24 connected to the upper end (fine hole part 14) of the nozzle 8, an ultrasonic vibrator 19 disposed in the lower end of the nozzle 8 for emitting ultrasonic wave toward the fine hole part 14 of the nozzle 8 when deaerated liquid flows into the nozzle 8 and an ultrasonic oscillator for vibrating the ultrasonic vibrator 19, and the bore of the fine hole part 14 is 20mum-1mm. | ||||||
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