专利汇可以提供Thin film solar battery专利检索,专利查询,专利分析的服务。并且PURPOSE:To improve the yield rate and performance of the a-Si solar battery, by providing a very thin chromium film on a transparent conductive film, thereby preventing the diffusion of a constituent element of the transparent conductive film into the a-Si. CONSTITUTION:Light is irradiated from the direction of an arrow B. A glass substrate 21 is washed by acetone, alcohol, and pure water by using ultrasonic waves. Thereafter, chromium is evaporated to the thickness of 30-200Angstrom by an electron beam or resistive heating. The optimum film thickness of the chromium is determined by transmittance of the chromium film and the diffusion preventing capability of the consituent element of the transparent conductive film into the a-Si, depending on the a-Si preparing conditions by a plasma CVD method. Under the ordinary preparing conditions, the chromium film of 70-100Angstrom is recommendable. An a-Si layer 24 and a metal electrode 25 are provided on said chromium film 23 by the conventional method, and the solar battery is completed.,下面是Thin film solar battery专利的具体信息内容。
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