专利汇可以提供Thin film solar battery专利检索,专利查询,专利分析的服务。并且PURPOSE:To obtain an efficient solar battery by providing a hetero junction type structure having a p type semiconductor thin layer made of copper sulfide or the like in contact with an amorphous Si layer. CONSTITUTION:After a substrate 1 is cleaned, 10vol of silane gas and 1 volume of phosphine gaa are mixed, a phosphorus-doped N type amorphous Si thin film 2 is formed at high frequency electric power in this gaa atmosphere in a glow discharge. Then, an amorphous Si thin film 3 is laminated on an N type amorphous Si thin film in sole silane gas. Subsequently, copper sulfide 4 is formed in a thin film by a flash evaporation process to form an n-i hetero junction structure. Thereafter, a gold deposited film 5 is formed as collecting electrode, a reflection preventive film 6 is further formed, and a thin film solar battery is thus formed. Since the forbidden band width of the copper sulfide is thus small, the sensitivity of the long wavelength side can be largely increased. The open voltage can be increased to raise the shortcircuitting current and to increase the spectral sensitivity with the P type semiconductor hetero junction type structure of the copper sulfide.,下面是Thin film solar battery专利的具体信息内容。
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