Manufacture of thin film solar battery
专利汇可以提供Manufacture of thin film solar battery专利检索，专利查询，专利分析的服务。并且PURPOSE: To make a series-connected wiring unneedful by a method wherein a plural pn-junction is formed by menas of a noncrystal semicodncutor material on a single glass substrate reversely and adjacently each other by moving a mask, and an electrode of solar battry element and a series wiring between them are unified.
CONSTITUTION: An In
2 O
3 -SnO
2 transparent conductive film 4 is fixed on a glass substrate 1 at given intervals through electron beam metallization, and a p
+ -type amorphous Si layer 6
1 is grown thereon as patterned on a stainless steel mask 5 through low-pressure glow discharge by means of a mixed gas of SiH
4 , H
2 , B
2 H
6 . Next, B
2 O
6 is turned to PH
3 and the mask 5 is moved at the same time so that n
+ - type amorphous Si layer 7
1 is positioned and grown between the layers 6
1 , and an i-type layer 6
2 and an n
+ -type layer 6
3 are fixed on the layer 6
1 and also an i-type layer 7
2 and a p
+ -type layer 7
3 are fixed on the layer 7
1 each through lamination. After that, a void 8 arising rectangularly between the layers 6
1 and 7
1 is filled with an Si
3 N
4 , the adjacent layer faces are connected in series with an Al electrode 10, and a light input is allowed to come in through an exposed surface of the substrate 1.
COPYRIGHT: (C)1980,JPO&Japio，下面是Manufacture of thin film solar battery专利的具体信息内容。
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