Specimen coating device for an SEM专利检索-控制棒核能专利检索查询-专利查询网

Specimen coating device for an SEM

阅读：445发布：2022-08-04

专利汇可以提供Specimen coating device for an SEM专利检索，专利查询，专利分析的服务。并且An improved method and apparatus for facilitating specimen handling during freezing, coating and transfer to and from the main chamber of an SEM. A unique specimen shuttle manipulable by a control rod permits transfer of a specimen between the main chamber and an auxiliary air lock chamber alternatively defined by an air lock housing and a coating apparatus housing. Either housing is removably attached to an entrance flange communicating via a gate valve assembly with the main chamber and is provided with a sealable access aperture for enabling transfer of both frozen and unfrozen specimens to and from the airlock chamber. The specimen manipulator enables specimen attachment and removal from the shuttle and has a frost shield for eliminating frost formation on the specimen surface during handling after freezing. The coating apparatus has a shuttle rotating platform and a removable oscillating filament assembly for enabling deposition of a layer of electrically conductive material on the specimen surface at the SEM site. A heat conducting path provides shuttle cooling in the main chamber to maintain a frozen specimen at a low temperature. The entrance flange is coupled to a vacuum pump to permit independent evacuation and backfilling of the airlock chamber in order to eliminate main chamber pressurization during specimen transfer.，下面是Specimen coating device for an SEM专利的具体信息内容。

权利要求

1. A coating device for depositing a coating material on a specimen mounted on a specimen shuttle prior to transfer to a main SEM chamber via an enclosed transfer tunnel, said coating device comprising: a housing having an apertured rear wall adapted to be coupled to said tunnel in sealing relation to the walls thereof; a cover member mounted on said housing, said cover member and said housing defining an airlock chamber when said cover is in a closed position, said cover member having a sealable aperture for providing access to said chamber; a shuttle platform rotatably mounted in said chamber adapted to receive said shuttle; means for rotating said shuttle platform; a filament assembly pivotally mounted in said cover member for carrying said coating material; means coupled to said rotating means for oscillating said filament assembly along an arcuate path having a center of rotation; and means for providing electrical power to said filament assembly.

2. The device of claim 1 wherein said filament assembly comprises a pair of spaced substantially parallel arms, a spacer bar coupled between said arms adjacent a first end thereof, a pair of trunnion members each secured to a different one of said arms for providing a pivot support, and a filament coupled between said arms.

3. The device of claim 2 wherein said filament comprises a pair of spaced facing tubular members, a pair of rods slideably received in said tubular members, each said rod having a cross bore adjacent the inner end thereof and a threaded outer end, a hairpin like member having a pair of legs each received in a different one of said cross bores, and means for biasing said rods outwardly of said arms to frictionally engage said legs with the inner ends of said tubular members.

4. The device of claim 2 wherein said filament comprises first and second mounting members each secured to a different one of said arms, said first mounting member having an axial bore, a first rod slideably received in said axial bore, means for securing said rod in said bore, said second mounting member having a closed axial bore, a second rod slideably received in said closed axial bore, and means for biasing said second rod against said first rod.

5. The device of claim 1 wherein said filament assembly includes a filament shield.

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Specimen coating device for an SEM

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