Measuring method of gap
专利汇可以提供Measuring method of gap专利检索，专利查询，专利分析的服务。并且PURPOSE: To reduce sharply a signal processing time for measuring a gap and to improve a throughput of X-ray exposure, by a method wherein the filtering for removing the high-frequency component of an interference wave is conducted physically by means of an analog filter.
CONSTITUTION: An interference wave 3 of two light fluxes, which is reflected by a thin and a substance disposed in a gap from the film, is received by an image sensor 1. Then, a component of unnecessary frequency is removed by an analog filter 6 from a sequential signal outputted from said sensor, and thereafter the signal is inputted to an A/D converter 4. The filter comprises a twin T-type band-pass passive filter composed of C and R, and an operational amplifier OA. Since the high-frequency component of the interference wave is removed physically by he analog filter to this constitution, a signal processing time can be reduced, and thus a throughput of X-ray exposure is improved.
COPYRIGHT: (C)1988,JPO&Japio，下面是Measuring method of gap专利的具体信息内容。
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