Automatic ellipsometer
阅读：673发布：2023-01-13
专利汇可以提供Automatic ellipsometer专利检索，专利查询，专利分析的服务。并且An automatic ellipsometer is disclosed which comprises a mechanical-optical, an electrical, and a digital (computer) component. The mechanical-optical component includes a light source, various polarizing elements (one of which spins continuously), necessary apertures, and a light detector. The electrical component includes a signal from the light detector, trigger pulses from an angular shaft encoder, and an analogdigital converter, and produces a string of digitized data in a form which can be read and analyzed by digital logical circuitry. The digital (computer) component comprises logic circuitry in sufficient quantity to store and execute a relatively simple data analysis program, there being suitably associated with the digital component, one or more print-out and/or display devices. To facilitate automation of ellipsometric operation, there is provided a sample alignment system which includes a spot-defining aperture in the incident light beam, a sample holder with capability for rotation about two perpendicular axes intersecting at the intersection of the axis of the light beam source and the axis of the detector, and a four-quadrant beam deviation detector located a convenient distance from the sample along the detector axis. In the operation of the system, the sample is properly oriented about two axes of rotation, and data in the form of light intensity transmitted through a continuously spinning analyzer in the reflected beam path is sampled at convenient angular intervals to provide data which is digitally coded, and the data then is numerically Fourier analyzed to enable extrapolated properties of the sample to be displayed or typed out. The entire sequence of operations, i.e., from sample insertion to type out or display is on the order of about 5-10 seconds.，下面是Automatic ellipsometer专利的具体信息内容。
1. An automatic ellipsometer for measuring characteristics of a sample disposed in a chosen incidence plane comprising: a monochromatic light source for providing an incident light beam on said sample to cause a light beam to be reflected therefrom; a first polarizing element in the path of said incident light beam, said first polarizing element being adapted to be fixed at a predetermined angle relative to said incidence plane; adjusting means for setting the azimuth of said first polarizing eleMent at different discrete predetermined angles relative to said incidence plane, a second and rotating polarizing element in the path of said reflected light beam; a photoresponsive device in the path of said reflected light beam responsive to said beam after it has passed through said second polarizing element, said photo-responsive device producing an electrical output in response to said reflected light beam''s impinging thereon; an angular encoder associated with said second polarizing element for providing first pulses for each revolution of said rotating second polarizing element and respective second pulses for each chosen fraction of each of said revolutions; an analog-to-digital converter responsive to the outputs of said angular encoder and said photoresponsive device for digitizing the output of said photoresponsive device in accordance with said second pulses; and data analyzing means responsive to the application thereto of the output of said analog-to-digital converter and said first pulses for analyzing the output of said photoresponsive device.
2. An automatic ellipsometer as defined in claim 1 wherein said predetermined angles are 0*, 12*, 45* and 90*.
3. An automatic ellipsometer as defined in claim 2 wherein said predetermined angle is 45* to place said ellipsometer in the normal mode of operation.
4. An automatic ellipsometer as defined in claim 1 and further including a quarter wave plate disposed in the path of said incident light beam intermediate said first polarizing element and said sample, and setting said first polarizing element at different discrete first predetermined angles relative to said incidence plane and second adjusting means for setting said quarter wave plate at different discrete second predetermined angles relative to said incidence plane.
5. An automatic ellipsometer as defined in claim 4 wherein said predetermined angles are 0*, 12*, 45* and 90*.
6. An automatic ellipsometer as defined in claim 5 wherein said first predetermined angle is 12* and said second predetermined angle is 90*.
7. An automatic ellipsometer as defined in claim 1 and further including a spot defining aperture means for said light beam which is disposed intermediate said first polarizing element and said sample, said aperture means having an axis of transmission which is colinear with incident light beam.
8. An automatic ellipsometer as defined in claim 7 wherein said monochromatic light source is a collimated laser source.
9. An automatic ellipsometer as defined in claim 8 wherein said laser is a HeNe laser.
10. An automatic ellipsometer as defined in claim 8 wherein said photoresponsive device is a photomultiplier tube.
11. An automatic ellipsometer as defined in claim 10 wherein said second and rotating polarizing element is driven by a rotating shaft; and wherein said angular encoder is mounted on said shaft.
12. An automatic ellipsometer as defined in claim 8 wherein the quantity of said second pulses produced for each of said revolutions is 2n wherein n is equal to 7 to 10.
13. An automatic ellipsometer as defined in claim 1 and further including: automatic sample alignment means comprising: sample holding means, means for rotating said sample holding means about two horizontal perpendicular axes which intersect at the point of intersection of said incident and reflected light beams, and reflected light beam deviation detection means disposed in the path of said reflected light beam.
14. An automatic ellipsometer as defined in claim 13 wherein said reflected light beam deviation detection means is disposed in the path of said reflected light beam intermediate said second polarizing element and said photoresponsive device.
15. An automatic ellipsometer as defined in claim 14 wherein one of said horizontal axes is a left-to-right rotational axis and the otHer of said horizontal axes is a front-to-rear rotational axis; said means for rotating said sample holding means further including first motor means for rotating said sample holding means about said one of said horizontal axes and second motor means for rotating said sample holding means about said other of said horizontal axes.
16. An automatic ellipsometer as defined in claim 15 wherein said reflected light beam deviation detection means comprises: four optical fiber bundles arranged in quadrature and defining a central aperture disposed in the proper path of said reflected light beam, a first pair of diametrically disposed ones of said optical fiber bundles being operative to detect lateral deviation of said reflected light beam from said proper path, and a second pair of the other diametrically disposed optical fiber bundles being operative to detect angular incidence deviations of said reflected light beam from its proper path; first, second, third and fourth photoresponsive means; first, second, third and fourth light pipe means associated with each of said optical fiber bundles respectively, for transmitting light from each of said bundles to impinge on said first, second, third and fourth photoresponsive means respectively, the impinging of light on said photoresponsive means causing the production of electrical outputs therefrom; means for applying the electrical outputs produced from the pair of said photoresponsive means in response to impinging light from said first pair of optical fiber bundles to said first motor means to cause the rotation of said sample holding means on said left-to-right axis for an angular distance sufficient to result in a zero output from said last-named photoresponsive means; and means for applying the electrical outputs produced from the pair of said photoresponsive means in response to impinging light from said second pair of optical fiber bundles, to said second motor means to cause said sample holding means to be rotated along said front-to-rear axis for an angular distance sufficient to result in a zero output from said last-named photoresponsive means; whereby upon the obtaining of a state wherein there is no output from said photoresponsive means, said reflected light beam is disposed in said proper path to pass through said defined aperture.
17. An automatic ellipsometer as defined in claim 16 wherein the photoresponsive means associated with each of said pairs of optical fiber bundles respectively comprise a pair of oppositedly poled photoelectric cells, said pairs of photoelectric cells producing error voltages in response to deviations of said reflected light beam from said proper path, the signs of said error voltages representing the senses of said deviations.
18. An automatic ellipsometer as defined in claim 15 wherein said sample holding means comprises: means for supporting said sample substantially at a plane which contains said point of intersection of the proper axes of said incident and reflected light beam; means associated with said supporting means, said associated means containing a first and vertical slot, and a second and a horizontal slot; first and second cams disposed in said first and second slots respectively; means for coupling said first motor to said first cam; and means for coupling said second motor to said second cam; whereby upon the actuation of said first motor means, said first cam is caused to be rotated and to move vertically in said first slot to thereby cause said sample holding means to be rotated about said front-to-rear rotational axis and whereby upon the actuation of said second motor means, said second cam is caused to be rotated to move horizontally in said second slot to thereby cause said sample holding means to be rotated about said left-to-right rotational axis.
19. An automatic ellipsometer as defined in claim 18 and further including: means associated with said supporting means for defining saiD left-to-right rotational axis as one which passes through the plane of the surface of said sample; and second means associated with said support for defining said front-to-rear rotational axis as one which is at the same height as said left-to-right rotational axis, and perpendicular thereto.
20. An automatic ellipsometer as defined in claim 19 and further including: means associated with said supporting means for preventing mechanical interference along said front-to-rear rotational axis.
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