Charged-particle beam unit
专利汇可以提供Charged-particle beam unit专利检索，专利查询，专利分析的服务。并且PURPOSE: To make it possible to correct a shift in focus and variation in magnification by weakening an excitation signal supplied to a lens corresponding to a voltage drop while accelerating a particle beam by a high voltage charged in an electric condenser at a pickup time.
CONSTITUTION: By an external command, switches S
1 to S
3 are connected to terminals (t
1 ), (t
3 ) and (t
5 ) respectively. A high-frequency signal from oscillator 9 is converted by direct-current high-tension generator 10 into a direct-current high voltage, which is supplied to storage unit 12. To take the picture of a sample penetrating image formed by an accelerating electron beam from electron gun 2, switches S
1 to S
3 are connected to terminals (t
2 ),(t
4 ) and (t
6 ) by an external command to apply a voltage charged in storage unit 12 to electron gun 2. In this case, the leakage of the charge of capacitor 12 is detected by resistance R and integrated by integrator 14 before being supplied to control power supply 15. Since power supply 15 supplies power to object lens 5 as less as a value of the signal from integrator 14, a shift in focus is corrected. Further, supplying this signal to lens control power supplies 16 and 17 keeps the magnification constant.
COPYRIGHT: (C)1979,JPO&Japio，下面是Charged-particle beam unit专利的具体信息内容。
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9 电容式指纹传感器
