Composite semiconductor device

阅读:411发布:2021-08-04

专利汇可以提供Composite semiconductor device专利检索,专利查询,专利分析的服务。并且PURPOSE:To improve the quantum efficiency and enhance the insulation between elements each other, by providing a window layer on a light receiving element in a composite semiconductor device wherein a light receiving element and an FET element are provided on one GaAs substrate. CONSTITUTION:The quantum efficiency of the light receiving element is improved, by providing the window layer constituted of a semi-insulating AlxGa1- xAs on the light receiving element, and then forming the GaAs layer constituting the active layer of the FET element via said AlxGa1-xAs layer. In other words, the periphery of the light receiving element region A, particularly the n -Al0.3Ga0.7As layer 13 and n-GaAs layer 12 between the region and the FET element region B are selectively removed, a mesa etching to isolate the light receiving element from the FET element is applied, and accordingly a GaAs pin photo diode and GaAsFET with the n -Al0.3Ga0.7As layer 13 as the window layer are formed on the same GaAs substrate.,下面是Composite semiconductor device专利的具体信息内容。

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