专利汇可以提供Device for measuring spreading resistance专利检索,专利查询,专利分析的服务。并且PURPOSE: To simultaneously enable the measurement of the spreading resistance of a semiconductor and the discrimination of its electroconductive type and accurately determine the position of a pn junction, by providing a thermoelectromotive force measuring instrument.
CONSTITUTION: A pair of probes 10a, 10b of a spreading resistance measuring instrument are placed in contact with the inside surface of a semiconductor substarte 1 so that the probes are separated at a prescribed distance from each other. An electrical current is supplied from a current source 11 to the semiconductor substrate between the probes. The voltage drop between the probes 10a, 10b with the electrical current flowing between them is detected by a voltage probe 12. At the same time, heating power 15 is applied to cause a heater 16 to heat. A temperature difference is thus made between a cold probe 14a and a warm probe 14b. When the probes 14a, 14b are placed in contact with the semiconductor substrate 1, a thermoelectromotive force is caused between the probes 14a, 14b by the temperature difference. The thermoelectromotive force is detected by a voltmeter 17.
COPYRIGHT: (C)1980,JPO&Japio,下面是Device for measuring spreading resistance专利的具体信息内容。
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