Forming method for guard ring of avalanche photodiode
专利汇可以提供Forming method for guard ring of avalanche photodiode专利检索，专利查询，专利分析的服务。并且PURPOSE:To form a guard ring by a low concentration Cd diffusion layer simply and positively by a mechanism wherein Cd is diffused to the desired region of a semiconductor in III-V group compounds in the periodic table, a mask is made up and thermal diffusion is conducted. CONSTITUTION:An N type InGaAs semiconductor layer 22 is formed on an N type InP semiconductor layer 21, an SiO2 film 23 is further deposited, diffusion holes 24 are built up to the guard ring forming prearranged sections of the film 23, Cd is diffused from the holes 24, and high concentration Cd layers 25 are made up. an SiO2 mask 26 is deposited on the film 23 to clog the holes 24, and thermal diffusion is conducted and a low concentration Cd diffusion layer is built up. The film 23 and the mask 26 are selectively etched, and a P layer 28 is formed. Thus, the low stable characteristics of dark currents are obtained because the breakdown voltage of junction made up by a guard ring 27 and the layer 22 is sufficiently greater than that of the junction built up by the layers 28 and 22 in the obtd. avalanche photodiode acquired.，下面是Forming method for guard ring of avalanche photodiode专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 一种面阵激光探测器的固定值噪声确定方法及去除方法 | 2020-05-08 | 769 |
| 一种多频调制激光动态目标测距测速系统及方法 | 2020-05-08 | 917 |
| 侧面接收光的硅增益光探测阵列器件的制作方法 | 2020-05-08 | 75 |
| 脉冲泵浦主动调Q输出双脉宽脉冲的激光器 | 2020-05-08 | 230 |
| 使用多个雪崩光电二极管元件检测光 | 2020-05-11 | 250 |
| 曲面基板上的光电探测器阵列 | 2020-05-12 | 321 |
| 一种光电探测器 | 2020-05-12 | 473 |
| 距离测量装置及距离测量方法 | 2020-05-11 | 819 |
| 一种用于驱动硅基雪崩光电二极管的电路结构 | 2020-05-12 | 987 |
| 一种二维扫描成像结构、显微镜及显微探头 | 2020-05-11 | 188 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
