Apparatus for bombarding a target with ions
阅读：269发布：2021-09-02
专利汇可以提供Apparatus for bombarding a target with ions专利检索，专利查询，专利分析的服务。并且An electromagnetic separator adapted for ion implantation on an industrial production scale has its beam current stabilized and a mechanism within the target chamber for automatically moving targets through the ion beam according to a predetermined scanning pattern.，下面是Apparatus for bombarding a target with ions专利的具体信息内容。
1. Apparatus for bombarding a target with ions, which apparatus comprises an ion beam source, a window, a magnet for deflecting the ion beam towards the window, means for modulating the energy of the ion beam so that the deflection produced by the magnet varies in correspondence with the modulation to thereby cause the deflection ion beam to sweep back and forth over the window, detector means for detecting the ion beam current passing through the window, ion beam control means responsive to the output of the detector means for controlling the ion beam energy modulating means so as to tend to maintain constant the intensity of the ion beam current passing through the window, target holder means for supporting a target behind the window, and drive means for imparting controlled movement to the target holder means to scan the target through the ion beam according to a predetermined scan pattern.
2. Apparatus as claimed in claim 1, wherein the window is at least as wide as the target to be bombarded and the ion beam control means control the ion beam to provide a substantially uniform ion beam intensity over the area of the window.
3. Apparatus as claimed in claim 2, wherein the target holder locates the target behind the window with the width of the target in register with the width of ion beam passing through the window, and the said drive means move the supported target lengthwise past the window at controlled speed.
4. Apparatus as claimed in claim 3, wherein the target holder carries a plurality of targets in a row and, when moved as aforesaid, moves the targets in succession at controlled speed past the window.
5. Apparatus as claimed in claim 4, wherein the said drive means reciprocates the target holder, whereby the targets are moved repeatedly past the window, the total ion dose being determined by the number of reciprocations.
6. Apparatus as claimed in claim 5, wherein the target holder is adapted to carry a plurality of rows of targets and the drive means includes means for indexing the target holder to bring another row of targets into register with the window.
7. Apparatus as claimed in claim 6, wherein the target holder comprises a cylinder with a plurality of racks arranged around the periphery, each rack carrying a row of targets extending parallel to the axis of the cylinder.
8. Apparatus as claimed in claim 1, wherein the target holder comprises a plate for supporting onE large target or a plurality of smaller targets, and a support for the plate, which support is moved by the said drive means.
9. Apparatus as claimed in claim 8, wherein the drive means comprise an X-Y drive.
10. Apparatus as claimed in claim 9, wherein the said support is adapted to release a plate it is carrying automatically at the end of a complete scanning operation and to return to the starting position for a further scanning operation.
11. Apparatus as claimed in claim 10, wherein means are provided for mounting a plurality of plates loaded with targets at a loading station having means for automatically loading a plate onto the said support when it returns to the starting position.
12. Apparatus as claimed in claim 1, wherein the ion beam is produced by an ion beam separator in which the magnet is an electromagnet.
13. Apparatus as claimed in claim 1, wherein the means for modulating the energy of the ion beam comprises an electrical source connected to superimpose an alternating voltage upon a high direct voltage supplied to the accelerating electrode of the ion beam source.
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