Supporting mechanism of wafer
专利汇可以提供Supporting mechanism of wafer专利检索，专利查询，专利分析的服务。并且PURPOSE: To enable to perform smooth parallel positioning work of the wafer by a method wherein a wafer chuck is elastically supported in a chuck support being enabled inclining motion by a spring member, and a lock mechanism is provided to constitute a wafer supporting part.
CONSTITUTION: When the chuck support 33 comes up, the support 33 moves to incline bending a plate spring as to make the surface of a wafer 20 to come in contact with respective leveling pads 30. Accordingly the wafer 20 is so regulated as the surface thereof is made to coincide with the standard face. When a pressure sensing element 36 detects that upward pressing force reached at the prescribed value, a detected signal therefrom is inputted to a control circuit 37, the circuit 37 supplies a current to electromagnets 52, and the electromagnets 52 absorb a lock plate 51. As a result, the wafer chuck 38 is locked in that condition, and thereafter although the wafer 20 is removed from the pads 30, the wafer 20 can be held in the condition as it is. After then by making the support 33 with the chuck 38 and the wafer 20 to come down in parallel, the position of the surface of the wafer 20 can be set up precisely.
COPYRIGHT: (C)1981,JPO&Japio，下面是Supporting mechanism of wafer专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 一种静电卡盘和半导体处理装置 | 2020-05-11 | 759 |
| 缺陷检测装置、缺陷检测方法、晶片、半导体芯片、裸片接合机、半导体制造方法、以及半导体装置制造方法 | 2020-05-11 | 109 |
| 晶片的加工方法 | 2020-05-08 | 769 |
| 晶片的加工方法 | 2020-05-11 | 210 |
| 切削装置和晶片的切削方法 | 2020-05-12 | 54 |
| 一种断路器磁脱扣核心组件焊接系统 | 2020-05-08 | 506 |
| 重复缺陷检查 | 2020-05-08 | 552 |
| 平衡静电力的方法和静电卡盘 | 2020-05-12 | 723 |
| 边缘修剪装置 | 2020-05-08 | 125 |
| 厚度测量装置 | 2020-05-08 | 151 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
