Digital displacement transducer
专利汇可以提供Digital displacement transducer专利检索，专利查询，专利分析的服务。并且PURPOSE: To enable the high precise measurement of a displacement amount and a displacement direction under a simple structure, by a method wherein, through irradiation of an optical scale, consisting of minute patterns, with a plurality of light spots, modulation of a strength of a reflection light from an optical scale is detected using light-receiving elements equivalent to the number of the spots.
CONSTITUTION: Staright-line, polarized laser beams are formed into an image on a scale pattern R after passing through a photon G for beam division, a lens L, a polarized beam splitter P, a mirror M, a 1/4 wavelength board W, and an objective V having a large aperture number. A reflecting light having a modulated strength flows reversely, and is reflected by a beam splitter P for image-formation on elements d
0 Wd
4 of a photodetector d. The output signal is processed in a processing circuit OP, and a displacement amount and a displacement direction of an object, whereto a pattern P is adhered, are measured from a change in the phase of the output signal and a phase difference in output between the elements. This permits performing of a high precise measurement under a simple structure.
COPYRIGHT: (C)1981,JPO&Japio，下面是Digital displacement transducer专利的具体信息内容。
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