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Method of and apparatus for testing the quality of bonded connections of semiconductor devices

阅读:33发布:2024-01-18

专利汇可以提供Method of and apparatus for testing the quality of bonded connections of semiconductor devices专利检索,专利查询,专利分析的服务。并且An apparatus is disclosed for the nondestructive testing of the integrity of a semiconductor device of the beam lead or flip chip type after it has been bonded to a mounting substrate. The apparatus comprises an air blast tester having at least two opposed air ducts to produce impinging fluid jets beneath the bonded chip. The opposed impinging jets result in a pressure buildup because of the deceleration of flow thereby resulting in a force on the underside of the semiconductor chip.,下面是Method of and apparatus for testing the quality of bonded connections of semiconductor devices专利的具体信息内容。

1. The method of applying stress to the bonded connections between a semiconductor chip and a substrate having an array of contacts thereon, said method including the steps of supporting said substrate having said chip spaced from and bonded to said substrate and subjecting the chip to at least a pair of oppositely disposed jets of a fluid medium, each said jet directed under said chip so as to impinge upon one another under said chip to produce a pressure buildup and a Consequent upward force against the underside of said bonded chip
2. Apparatus for applying stress to a semiconductor chip bonded and spaced from a substrate having an array of contacts thereon, said apparatus comprising means for supporting said substrate and means for applying a pair of fluid jets in opposed relation so as to impinge directly between said bonded semiconductor and said substrate.
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