Measuring method of distance
专利汇可以提供Measuring method of distance专利检索，专利查询，专利分析的服务。并且PURPOSE: To measure the dislocation distnace of an object from the moire fringe due to the interference betweeen the projected grating image, which is formed from a grating projecting portion upon the object to approach and leave the projecting portion, and another standard grating.
CONSTITUTION: By lighting a spot light source S, a projected image of a first grating G
1 is formed through a projecting lens 3 upon the surface 0 of an object to be inspected. The projected grating image on the object surface 0 is focused through the lens 3 and a half mirror 2 upon a second grating G
2 thereby to form a moire fringe. This fringe is varied with the roughness and distance K of the object 0. As a result, if the object is the same, the variation in the distance K corresponds to the variation in the moire fringe. This moire fringe is observed beofre and after the displacement of the object so that the displacement of K for the distance K of the object can be determined on accordance with the variation in the relative angle of the moire fringe or in the pitch.
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