Charged particle beam device

阅读:926发布:2021-11-30

专利汇可以提供Charged particle beam device专利检索,专利查询,专利分析的服务。并且PURPOSE: To realize the excellent convergence characteristic regardless of the change of radiation energy by providing a device selectively applied with the voltage between a target and the final-stage focusing lens and accelerating/ decelerating a charged particle beam.
CONSTITUTION: A charged particle beam is radiated to a target 20 via an objective lens 19 which is the final-stage focusing lens. The target 20 is mounted on an insulating insulator 23, the positive or negative voltage is selectively applied from a high-voltage power source 24 via a switch circuit 25. The high- voltage power source 24 and the switch circuit 25 are controlled by a control circuit 26. When -100kV is applied to an ion beam accelerated by the accelerating voltage of 100kV from an ion source 11, for example, the ion beam of 200kV is radiated to the target 20. The ion beam with the fixed energy can be used up to the objective lens 19, thus the optimum focusing is obtained.
COPYRIGHT: (C)1990,JPO&Japio,下面是Charged particle beam device专利的具体信息内容。

高效检索全球专利

专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台,是提供专利分析,专利查询,专利检索等数据服务功能的知识产权数据服务商。

我们的产品包含105个国家的1.26亿组数据,免费查、免费专利分析。

申请试用

分析报告

专利汇分析报告产品可以对行业情报数据进行梳理分析,涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度,系统通过AI智能系统对图表进行解读,只需1分钟,一键生成行业专利分析报告。

申请试用

QQ群二维码
意见反馈