专利汇可以提供Device for measuring distribution of chemical species专利检索,专利查询,专利分析的服务。并且PURPOSE:To measure directly and quickly the three-dimensional concn. distribution of the specific chemical species in plasma with high sensitivity by exciting resonantly the chemical species in the plasma by laser light and measuring spectrally the fluorescence thereof with a prescribed optical system. CONSTITUTION:Light 2 of the resonance wavelength of the specific chemical species in plasma of a device 1 utilizing plasma is emitted from a dye laser generating mechanism 3 and scans the plasma with a movable mirror 5 and a parabolic mirror 6 driven by a control mechanism 11. The flurescence generated from a measuring point 8 is condensed onto an optical fiber 17 provided to a scanning mechanism 6 for photodetection by a condenser lens 5 and is detected via a spectral mechanism 18 by a photoelectric converting mechanism 19. The output voltage thereof is fed to the mechanism 11. The mechanism 11 displays the information on the position of the point 8 together with said voltage value on a display mechanism 20. The three-dimensional concn. distribution of the specific chemical species in the plasma is thus directly and quickly measured with high sensitivity.,下面是Device for measuring distribution of chemical species专利的具体信息内容。
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