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Positioning device

阅读:665发布:2022-01-09

专利汇可以提供Positioning device专利检索,专利查询,专利分析的服务。并且PURPOSE: To enable stable positioning without generating dust and damaging the side surface of a semiconductor wafer by optically taking in the picture of the wafer and detecting the inclination of the wafer.
CONSTITUTION: An original binary picture (d) is turned at 180°, using the center (p) of a picture plane as the center of revolution, the quantity Q of displacement in the X direction and the quantity R of displacement in the Y direction as the difference of each barycentric coordinate (e), (h) are obtained, and a shift picture (j) is acquired in response to the quantities of displacement. The exclusive OR of the original binary picture (d) and the shift picture (j), the centers of gravity of which coincide, is taken in an exclusive OR circuit 10, an anticoincidence picture (k) is output, and the picture is reduced only by the number of picture elements determined by the size of picture elements and the size of a wafer by a reduction circuit 11. A reduced picture (l) output from the reduction circuit 11 has two regions by a peculiar shape by the orientation flat of the wafer. The centers of gravity of the two regions are each acquired by a region processing circuit 12. The inclination (n) of the wafer is obtained as the inclination of a straight line passing through the two centers of gravity in an inclination computing circuit 13 by using said acquired two reduced region gravity-venters (m).
COPYRIGHT: (C)1988,JPO&Japio,下面是Positioning device专利的具体信息内容。

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