NONCONTACT CONVEYANCE DEVICE |
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| 申请号 | EP12825546 | 申请日 | 2012-08-24 | 公开(公告)号 | EP2750175A4 | 公开(公告)日 | 2015-03-25 |
| 申请人 | HARMOTEC CO LTD; | 发明人 | IWASAKA HITOSHI; TOKUNAGA HIDEYUKI; KOSHIISHI KATSUHIRO; | ||||
| 摘要 | The object of the present invention is to suppress rotation of a plate-like member, which is caused when the plate-like member is conveyed in a non-contacting manner. Non-contacting conveyance equipment for conveying a plate-like member in a non-contacting manner comprises a plate-like base body and a plurality of swirl flow-forming bodies provided at the base body. Each of the plurality of swirl flow-forming bodies includes a column-shaped main body, a cylindrical chamber formed inside the main body, that has an opening at one end, a flat end face formed at a surface of the main body, in which the cylindrical chamber is opened, a jetting port provided at an inner circumferential surface of the cylindrical chamber, a fluid introduction port provided at an outer circumferential surface of the main body, and a fluid passage that connects the fluid introduction port to the jetting port. The fluid passage is arranged so that a direction in which a fluid flows out of the cylindrical chamber along the end face is substantially parallel to a line that extends from a center of gravity of the plate-like member being conveyed, toward an outer circumference of the plate-like member. | ||||||
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