Chips with hermetically sealed but openable chambers

申请号 US15237965 申请日 2016-08-16 公开(公告)号 US10005271B2 公开(公告)日 2018-06-26
申请人 Raymond Miller Karam; Thomas Wynne; Anthony Thomas Chobot; 发明人 Raymond Miller Karam; Thomas Wynne; Anthony Thomas Chobot;
摘要 Embodiments generally relate to chips containing one or more hermetically sealed chambers that may be dismantled under controlled conditions using a release technique. In one embodiment a chip comprises a first hermetic seal bonding first and second elements to create a first chamber and a second hermetic seal bonding third and fourth elements to create a second chamber encompassing the first chamber. The first hermetic seal may be broken open independently of the second hermetic seal by the application of a mechanical or thermal technique.
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