NANOPARTICLE WITH PLURAL FUNCTIONALITIES, AND METHOD OF FORMING THE NANOPARTICLE

申请号 US15691800 申请日 2017-08-31 公开(公告)号 US20180026186A1 公开(公告)日 2018-01-25
申请人 International Business Machines Corporation; 发明人 Qing CAO; Kangguo CHENG; Zhengwen LI; Fei LIU;
摘要 A method of forming a nanoparticle includes forming a layer of semiconductor material on a substrate, forming a first layer on the semiconductor material, and etching the semiconductor layer to form the nanoparticle including the first layer on a first side of the nanoparticle and the semiconductor material on a second side of the nanoparticle.
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