NANOPARTICLE WITH PLURAL FUNCTIONALITIES, AND METHOD OF FORMING THE NANOPARTICLE |
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申请号 | US15691800 | 申请日 | 2017-08-31 | 公开(公告)号 | US20180026186A1 | 公开(公告)日 | 2018-01-25 |
申请人 | International Business Machines Corporation; | 发明人 | Qing CAO; Kangguo CHENG; Zhengwen LI; Fei LIU; | ||||
摘要 | A method of forming a nanoparticle includes forming a layer of semiconductor material on a substrate, forming a first layer on the semiconductor material, and etching the semiconductor layer to form the nanoparticle including the first layer on a first side of the nanoparticle and the semiconductor material on a second side of the nanoparticle. | ||||||
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说明书全文 |